Charged Particle Beam Deflection via High-Resolution DAC

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Solution Overview

Problem

Current systems for inspecting, modifying, or analyzing a region of interest in samples using charged particles face challenges with precise zooming and shifting, leading to discontinuous image shifts and errors due to amplifier changes, which can be perilous for tasks like circuit edit.

Innovation Solution

A system with a digital to analog converter (DAC) having a higher resolution than the pixel image, allowing for precise control of charged particle beam deflection without amplifier changes, and an alignment subsystem with kinematic mounts for precise sample positioning, eliminating the need for mechanical stages and reducing vibrations and contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If amplifier changes are used to achieve zooming and shifting, then the system can adjust the field of view, but discontinuous image shifts and errors occur

Engineering Contradiction:

Improvezooming and shifting capabilityVSAvoidimage continuity

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent removes amplifiers from the signal path between the detector and display. By extracting this component, the system eliminates the source of discontinuous image shifts and errors that occurred during amplifier changes, while maintaining zooming and shifting capabilities through direct digital control of the display device.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the analog amplifier-based zooming/shifting mechanism with a digital approach. The display device receives digital signals directly from the detector and uses digital scaling and positioning to achieve zooming and shifting without mechanical or analog intermediate components, ensuring continuous and error-free image adjustment.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If mechanical stages are used for sample positioning, then the sample can be positioned and moved, but vibrations and contamination increase

Engineering Contradiction:

Improvesample positioningVSAvoidvibrations and contamination

Core Design Contradiction:

Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The patent replaces mechanical stages with a digital coordinate system approach. The detector and display device are precisely calibrated to match coordinate systems, allowing sample positioning and navigation through digital coordinate transformations rather than mechanical movement. This eliminates vibrations and contamination associated with mechanical stages while maintaining precise positioning capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If DAC resolution matches pixel resolution, then the system is simpler, but precise beam deflection control is limited

Engineering Contradiction:

ImproveDAC configurationVSAvoidbeam deflection precision

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The patent segments the deflection control into two independent components: the DAC generates deflection signals with high resolution independent of pixel count, while the display device handles image rendering at pixel resolution. This segmentation allows the DAC to provide precise beam deflection control without being constrained by matching the detector's pixel resolution, achieving both precision and flexibility.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-fidelity imaging and patterning with continuous zooming and shifting capabilities, improving reliability and reducing errors, while maintaining precise sample positioning and reducing operational complexities.

Implementation Method 1

a charged particle deflection device to produce a scanning charged particle beam

Methodology Applied

Scientific EffectElectromagnetic deflection: Lorentz Force

Data Source

PatentUS12044638B2System to inspect, modify or analyze a region of interest of a sample by charged particles, set of systems to inspect, modify or analyze a region of interest of a sample and method to inspect, modify or analyze a region of interest of a sample by charged particles

Publication Date: 2024.07.23 CARL ZEISS SMT GMBH

AI summary

A system inspects, modifies or analyzes a region of interest of a sample via charged particles. A detector device of the system produces a pixel image having horizontal and vertical pixel resolutions. A charged particle deflection device produces a scanning charged particle beam in a scanning region. The deflection device has horizontal and vertical deflection units controlled by a digital to analog converter having a digital resolution larger than the horizontal pixel resolution and/or the vertical pixel resolution. An operator control interface of the system selects an assignment between respective image pixels of a desired pixel image and digital inputs of the DAC to produce horizontal and/or vertical deflection signals to guide the charged particle beam to the location of the respective image pixel. A reliable image of a sample can be obtained even when there is zooming or panning within an accessible region of the sample.