Charged Particle Beam Deflection for Edge Inspection
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Solution Overview
Problem
Current charged particle beam devices face challenges in precisely inspecting the edges and bevels of specimens at the micrometer and nanometer scale, as mechanical movements for these areas are imprecise and slow, limiting effective imaging and inspection of structured surfaces, edges, and lower surfaces.
Innovation Solution
A charged particle beam device with a primary objective lens and a deflection unit that generates a significant deflection angle (between 60° and 135°) to focus and direct the beam onto the specimen's edge or bevel, allowing for improved imaging and inspection, and a method that includes deflecting the primary charged particle beam between the objective lens and the specimen stage to enable precise measurement of these areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If mechanical movement is used to position the specimen for edge or bevel imaging, then the specimen can be moved to different areas, but the positioning is imprecise and slow
Solution Approach 1:
The patent replaces mechanical specimen movement with electromagnetic beam deflection. A deflection unit (electromagnetic lens or electrostatic deflector) redirects the charged particle beam at angles of 45° to 135° relative to the optical axis, enabling precise and rapid imaging of edges and bevels without mechanical specimen manipulation. This substitution eliminates mechanical positioning errors and speeds up the imaging process significantly.
2Ease of operation
If a standard optical axis alignment is used, then the beam path is simple, but the edge or bevel of the specimen cannot be effectively imaged
Solution Approach 1:
The patent introduces dynamic beam deflection capability that allows the beam path to be adjusted in real-time. The deflection unit can generate deflection angles between 45° and 135° relative to the optical axis, enabling the system to adapt to different specimen features (edges, bevels, lower surfaces) while maintaining a relatively simple overall optical configuration. The beam path becomes dynamic rather than fixed, providing versatility without excessive complexity.
3Adaptability or versatility
If the charged particle beam is directed at high angle to the optical axis, then edge and bevel imaging is enabled, but the deflection unit complexity increases
Solution Approach 1:
The patent achieves high-angle beam deflection (45° to 135°) by adjusting electromagnetic or electrostatic field parameters within the deflection unit. By controlling the strength and configuration of these fields, the system can generate the required deflection angles using standard components, avoiding the need for complex mechanical articulation or multiple specialized optical elements. The complexity is managed through parameter control rather than structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient imaging and inspection of the edge, bevel, and surface of specimens, enhancing the ability to detect features like cracks and layer peeling, and allowing for the measurement of structured surfaces with improved accuracy and speed compared to traditional mechanical movements.
Implementation Method 1
a primary objective lens for focusing a primary charged particle beam
Implementation Method 2
a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area towards a beam path for impingement on the specimen
Data Source
AI summary
A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.