Directed Energy Beam Deflection Correction Using Field Mapping

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Solution Overview

Problem

Existing additive manufacturing systems using electron beams or laser beams face challenges in precisely establishing beam shape, size, and position due to time-consuming manual calibration procedures, and there is a need for more accurate delivery of directed energy beams in metallic part production.

Innovation Solution

The method involves using a camera to obtain images of calibration features in the patterning field, processing pixel coordinates to spatial coordinates, and establishing compensated deflections for electron or laser beams based on these mappings, which can include database interpolation or mathematical functions, to achieve precise beam positioning and alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If manual calibration procedures are used to establish beam shape, size, and position, then beam positioning precision can be achieved, but the process becomes time-consuming

Engineering Contradiction:
Improvebeam positioning precisionVSAvoidcalibration time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent replaces manual mechanical calibration procedures with an automated optical measurement system. A camera captures images of calibration features, and image processing algorithms automatically determine beam position and dimensions, eliminating the need for time-consuming manual adjustments while maintaining precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs self-calibration by automatically capturing images of calibration features, processing the images to determine beam parameters, and adjusting beam deflections without requiring operator intervention. This self-service approach reduces calibration time while maintaining accuracy.

Inventive Principle:
Principle #25Self-service

2Productivity

If automated image processing and mapping systems are implemented, then beam positioning efficiency improves, but system complexity increases

Engineering Contradiction:
Improvecalibration efficiencyVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent introduces an intermediary coordinate mapping system that bridges the camera's pixel coordinate system and the beam's physical coordinate system. This mapping layer simplifies the overall system by providing a standardized interface between the optical measurement domain and the beam control domain, making the automated calibration process more manageable despite the added components.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables more accurate and efficient additive manufacturing by reducing manual calibration time and improving the precision of electron or laser beam positioning, leading to higher quality metallic part production with minimal operator intervention.

Implementation Method 1

obtaining at least one image of cathodoluminescence from the scan locations in response to the electron beam

Methodology Applied
Scientific EffectCathodoluminescence: Cathodoluminescence

Data Source

PatentUS20240157641A1Directed energy beam deflection field monitor and corrector
Publication Date: 2024.05.16 NIKON CORP
  • US20240157641A1 patent drawing
  • US20240157641A1 patent drawing
  • US20240157641A1 patent drawing

AI summary

Directed energy beam deflections are compensated by mapping pixel coordinates of an image of a patterning field to patterning field spatial coordinates. For example, electron beam scanning is compensated by imaging calibration features defined on a reticle to produce a mapping between pixel and physical coordinates. An electron beam is scanned to produce cathodoluminescence at a plurality of scan locations in a patterning field. With the pixel coordinate mapping, an image of the cathodoluminescence is used to determine compensated scan drive values. Other directed energy beam deflections can be similarly compensated.