Charged Particle Beam Deflector for Stereoscopic Observation
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Solution Overview
Problem
Conventional charged particle beam devices can only capture stereoscopic images from directly above and require complex mechanical adjustments or dedicated tools for oblique views, limiting operational ease and flexibility in stereoscopic observation methods.
Innovation Solution
A charged particle beam device with a deflector and independent power supplies for scanning and displaying parallax images, allowing for real-time switching of observation directions and methods using a mouse operation, enabling stereoscopic image capture from various angles without mechanical sample stage adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a stereoscopic image is captured from obliquely above by tilting or rotating a sample stage, then the viewing direction can be changed, but the operation becomes complicated and time-consuming due to mechanical adjustments
Solution Approach 1:
The patent replaces the mechanical sample stage tilting/rotating system with an electromagnetic deflector system. The deflector uses electromagnetic fields to change the beam angle of irradiation, allowing stereoscopic image capture from various directions without mechanical adjustments. This substitution eliminates the complexity of mechanical operations while maintaining the ability to capture images from different viewing angles.
Solution Approach 2:
The patent changes the parameter of beam angle of irradiation using the deflector to achieve different viewing directions. By adjusting the deflector's electromagnetic field parameters, the system can capture stereoscopic images from directly above, obliquely above, or other angles, replacing the need for mechanical stage adjustments with electrical parameter control.
2Adaptability or versatility
If multiple stereoscopic observation methods are provided, then user flexibility is improved, but device complexity increases
Solution Approach 1:
The patent implements a universal deflector system that can support multiple stereoscopic observation methods (cross method, parallel method, anaglyph method, and stereoscopic liquid crystal display) through a single hardware platform. The deflector and power supply system are designed to be multi-functional, accommodating different observation methods without requiring separate dedicated hardware for each method, thus providing user flexibility while controlling system complexity.
3Adaptability or versatility
If the deflector is applied with two different voltages to obtain first and second images, then stereoscopic images from different angles can be captured, but the power supply system becomes more complex
Solution Approach 1:
The patent employs a dynamic power supply switching system where the switch can dynamically connect the deflector to different power supplies (first power supply for first image, second power supply for second image) based on the required viewing angle. This dynamic switching capability allows the system to capture stereoscopic images from different angles while managing power supply complexity through intelligent control rather than permanent dual-power- supply architecture.
Solution Approach 2:
The patent implements periodic switching between different power supplies in synchronization with the scanning process. The switch alternates between connecting the first power supply and the second power supply to the deflector, corresponding to the scanning of different image lines or frames, thereby capturing stereoscopic images from different angles through periodic voltage application.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates easy selection and execution of stereoscopic observation directions and methods, enhancing operational convenience and flexibility by allowing parallax image display and switching without the need for complex mechanical adjustments or dedicated tools.
Implementation Method 1
a deflector for deflecting an angle of irradiation of the primary-charged particle beam on the sample, the deflector being applied with two different voltages to obtain a first image and a second image
Data Source
AI summary
According to the present invention, in a charged particle beam device having a charged particle source, an objective lens for focusing a primary-charged particle beam emitted from the charged particle source, a scan deflector for scanning the primary-charged particle beam on a sample, and a detector for detecting signal particles generated from the sample under scanning of the primary-charged particle beam, whereby a sample image is obtained by using the signal particles of the detector, the charged particle beam device comprises a deflector for deflecting an angle of irradiation of the primary-charged particle beam onto the sample, first and second independent power supplies for passing currents to the deflector, and a switch for switching over voltages applied from the two power supplies in unit of one line or one frame of scanning of the primary-charged particle beam.