Beam Density Measurement Using Shield Translation
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Solution Overview
Problem
Conventional ion beam current density measurement systems are limited to one-dimensional measurements, and adding multiple pixels for two-dimensional measurements increases cost and complexity, with space constraints in ion implanters.
Innovation Solution
A beam density measurement system using a shield and a beam sensor with an actuator to translate the shield relative to the sensor, blocking the beam and measuring intensity changes to determine beam density distribution in two dimensions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple pixels are added to the beam sensor for two-dimensional measurements, then measurement capability is improved, but device complexity and cost increase
Solution Approach 1:
The measurement function is segmented between a simple linear sensor array and a moving shield. The sensor array provides spatial resolution in one dimension, while the shield's motion provides the second dimension, dividing the complex 2D measurement task into simpler components that reduce overall system complexity
Solution Approach 2:
The shield acts as an intermediary element that modulates the beam signal to the sensor. By moving the shield, the system indirectly measures beam density distribution without requiring complex multi-pixel sensors, using the shield as a mechanical mediator to achieve 2D measurement capability
2Measurement precision
If multiple pixels are added to the beam sensor, then two-dimensional measurement capability is improved, but space requirements increase
Solution Approach 1:
The measurement functionality is segmented across two components: a compact linear sensor array and a separately actuated shield. This segmentation allows the sensor to remain small and simple while the shield, which provides the second measurement dimension, moves in the beam direction, effectively distributing the spatial requirements and reducing the footprint at any single location
Solution Approach 2:
The system transitions from a planar 2D sensor array to a 1D sensor array combined with motion in the beam direction (third dimension). By utilizing the beam direction as an additional measurement dimension through shield motion, the system achieves 2D measurement capability without requiring a large 2D array of pixels, thus reducing space requirements
3Area of stationary object
If a traveling profiler sensor is used with fewer pixels, then space usage is improved, but measurement speed decreases
Solution Approach 1:
The shield moves periodically or continuously through defined positions, and at each position or interval, the sensor captures a measurement. This periodic sampling approach allows the system to build up a complete 2D measurement over time using a simple linear sensor array, achieving both space efficiency and acceptable measurement speed through systematic sequential measurement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables cost-effective and space-efficient two-dimensional beam density measurement, simplifying mechanical systems and integrating easily into existing ion implanters.
Implementation Method 1
The beam sensor is positioned downstream from the shield in a direction of travel of a beam. The beam sensor is configured to sense an intensity of the beam
Data Source
AI summary
A beam density measurement system includes a shield, a beam sensor, and an actuator. The beam sensor is positioned downstream from the shield in a direction of travel of a beam. The beam sensor is configured to sense an intensity of the beam, and the beam sensor has a long dimension and a short dimension. The actuator translates the shield relative to the beam sensor, wherein the shield blocks at least a portion of the beam from the beam sensor as the shield is translated relative to the beam sensor, and wherein measured values of the intensity associated with changes in a position of the shield relative to the beam sensor are representative of a beam density distribution of the beam in a first direction defined by the long dimension of the beam sensor.