Charged Particle Beam Device Automatic Detector Selection
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Solution Overview
Problem
Operators of charged particle beam devices face difficulties in selecting the appropriate reflected electron detection elements for acquiring intended images due to the complexity of assessing the size and shape of the elements, positional relationships, and vacuum states, leading to time-consuming trial-and-error processes.
Innovation Solution
The charged particle beam device automatically selects reflected electron detection elements based on the vacuum state and positional relationships between the sample and the detector, allowing for efficient image acquisition without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple reflected electron detection elements are used to acquire both compositional images and unevenness images, then the versatility and quality of image acquisition is improved, but the complexity of selecting the appropriate detection element increases
Solution Approach 1:
The charged particle beam device automatically determines the appropriate reflected electron detection element based on vacuum state and positional relationship parameters without requiring manual operator assessment. The system self-evaluates the operating conditions and selects the optimal detection element, eliminating the complex manual selection process while maintaining the ability to acquire both compositional and unevenness images.
Solution Approach 2:
The invention uses changes in vacuum state parameters and positional relationship parameters as the basis for automatically selecting the appropriate detection element. By monitoring these parameters and establishing predetermined thresholds, the system dynamically adjusts detection element selection based on current operating conditions, simplifying the operator's task while maintaining versatility.
2Measurement precision
If manual trial-and-error selection of detection elements is performed to acquire intended images, then the appropriate detection element can be selected, but the time required for image acquisition increases significantly
Solution Approach 1:
The system pre-establishes the relationship between vacuum state parameters, positional relationship parameters, and optimal detection element selection. Before actual image acquisition begins, the appropriate detection element is automatically determined based on current parameters, eliminating the need for time-consuming trial-and-error adjustments during the imaging process.
Solution Approach 2:
The system continuously monitors vacuum state and positional relationship parameters, using this feedback to automatically determine the appropriate detection element. This closed-loop approach ensures the most suitable detection element is selected based on real-time conditions, achieving accurate image acquisition without manual trial-and-error time delays.
3Measurement precision
If repeated adjustments of detection elements and positional relationships are made to determine optimal settings, then the intended image can be acquired, but sample deterioration increases
Solution Approach 1:
The system automatically determines the optimal detection element and positional relationship settings without requiring repeated manual adjustments. By self-evaluating vacuum state and positional parameters, the system identifies the best configuration in advance, minimizing the number of times the primary charged particle beam needs to be redirected or adjustments made, thereby reducing sample deterioration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables rapid and practical acquisition of intended images by automating the selection process, reducing operator effort and minimizing sample deterioration from repeated adjustments.
Implementation Method 1
a reflected electron detector that is disposed between an objective lens and a sample and detects a reflected electron
Implementation Method 2
an objective lens and a sample
Data Source
AI summary
The objective of the present invention is to provide a charged particle beam device, wherein the positional relationship between reflected electron detection elements and a sample and the vacuum state of the sample surroundings are evaluated to select automatically a reflected electron detection element appropriate for acquiring an intended image. In this charged particle beam device, all the reflected electron detection elements are selected when the degree of vacuum inside the sample chamber is high and the sample is distant from the reflected electron detectors, while a reflected electron detection element appropriate for acquiring a compositional image or a height map image is selected when the degree of vacuum inside the sample chamber is high and the sample is close to the reflected electron detectors. When the degree of vacuum inside the sample chamber is low, all the reflected electron detection elements are selected.