Charged Particle Beam Device Asymmetric Partition Wall
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Solution Overview
Problem
Existing charged particle beam devices face challenges in observing samples under atmospheric pressure due to the trade-off between enlarging the emission electron transmitting area of the thin film, which compromises its strength and integrity.
Innovation Solution
A charged particle beam device configuration that includes a partition wall with a larger opening area on the charged particle irradiation unit's side than on the sample's side, allowing the primary charged particle beam to pass through a thin film covering the sample, while maintaining the vacuum state in the first housing and allowing atmospheric pressure in the second housing, optimizing the thin film's arrangement for efficient electron detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the emission electron transmitting area of the thin film is enlarged to efficiently detect electrons emitted from the sample, then the electron detection efficiency is improved, but the strength and integrity of the thin film deteriorates
Solution Approach 1:
The partition wall is designed with an asymmetric opening structure where the opening area on the charged particle irradiation unit side is larger than the opening area on the sample side. This asymmetric configuration allows the thin film to have sufficient strength while still enabling efficient electron transmission, as the larger opening on the irradiation side facilitates electron detection without compromising the film's structural integrity on the sample side
2Productivity
If the thin film is made thinner to allow better transmission of charged particles, then the transmission efficiency is improved, but the mechanical strength and stability of the film deteriorates
Solution Approach 1:
The asymmetric opening design creates a structural configuration where the thin film can be made thinner for better charged particle transmission while the larger opening area on the irradiation side provides sufficient structural support and stability, preventing the film from collapsing or deforming under atmospheric pressure conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables practical observation of samples in atmospheric pressure conditions by ensuring both efficient electron detection and sufficient thin film strength, enhancing the device's capability to observe sensitive or liquid samples.
Implementation Method 1
a thin film which covers the sample's side of the opening part and transmits or allows through the primary charged particle beam and the charged particle beam
Implementation Method 2
an evacuation device which evacuates the inside of the first housing
Data Source
AI summary
A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.