Charged Particle Beam Device Foreign Matter Removal Control
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Solution Overview
Problem
Charged particle beam devices face challenges in removing foreign matter adhering to electric field-correcting electrodes, which can contaminate samples during measurement, as existing methods are ineffective when electric field-correcting electrodes are present.
Innovation Solution
A charged particle beam device with a foreign-matter removal control unit that applies periodic or increased voltages to electric field-correcting electrodes or neighboring electrodes to dislodge and remove adhering foreign matter, using a dummy sample or without one, ensuring the foreign matter does not adhere to the measurement sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an electric field-correcting electrode is provided in the outer peripheral portion of the sample to correct electric field distortion, then measurement precision is improved, but foreign matter adheres to the electrode causing sample contamination
Solution Approach 1:
The patent applies a preliminary cleaning action by removing foreign matter from the electric field-correcting electrode before sample measurement begins. The foreign matter removal unit activates to clean the electrode surface, preventing subsequent foreign matter adhesion that would contaminate the sample and compromise measurement precision.
Solution Approach 2:
The patent extracts and separates the foreign matter removal function from the measurement function. By providing a dedicated foreign matter removal unit distinct from the measurement unit, the system can independently clean the electrode without interfering with the measurement process, thus maintaining measurement precision while eliminating contamination risks.
2Object-affected harmful factors
If foreign matter removal methods from existing patents are applied, then foreign matter can be removed from electrodes, but these methods are ineffective when electric field-correcting electrodes are present
Solution Approach 1:
The patent creates a universal foreign matter removal system that works effectively with electric field-correcting electrodes. The foreign matter removal unit is designed to be compatible with and effective for correcting electrodes, making the cleaning method universally applicable to this specific electrode type that previous methods failed to address.
Solution Approach 2:
The patent introduces a foreign matter removal unit as an intermediary component between the electric field-correcting electrode and the sample. This intermediary unit actively removes foreign matter from the electrode surface, preventing direct contact between contaminants and the sample, thus solving the incompatibility of previous removal methods with correcting electrodes.
3Measurement precision
If the charged particle beam track is bent due to electric field distortion at the outer peripheral portion, then measurement cannot be performed, but adding correction electrodes introduces foreign matter adhesion risk
Solution Approach 1:
The system performs preliminary foreign matter removal from the electric field-correcting electrode before beam measurement begins. This preliminary cleaning action ensures the electrode surface is free from contaminants that could be transferred to the sample, while the electrode continues to provide necessary electric field correction for accurate beam tracking.
Solution Approach 2:
The patent extracts the foreign matter removal function into a separate unit that operates independently from the measurement process. This allows the electric field-correcting electrode to maintain its correction function for beam track accuracy while the separate removal unit eliminates contamination risks by cleaning the electrode surface.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes foreign matter from electric field-correcting electrodes, preventing contamination of measurement samples and maintaining measurement accuracy by ensuring the foreign matter is scattered to a designated area or removed entirely.
Implementation Method 1
a first voltage is applied to the electric field-correcting electrode and/or a second voltage is applied to a neighboring electrode arranged near the electric field-correcting electrode to remove a foreign matter adhering to the electric field-correcting electrode
Data Source
AI summary
A charged particle beam device capable of removing a foreign matter adhered to an electric field-correcting electrode arranged in an outer peripheral portion of a measurement sample is provided. The invention is directed to a charged particle beam device including a sample stage provided with the measurement sample and an electric field-correcting electrode correcting an electric field in the vicinity of the outer peripheral portion of the measurement sample and in which the measurement sample is measured by being irradiated with a charged particle beam, wherein a foreign-matter removal control unit controls a power source connected to the electric field-correcting electrode such that an absolute value of a voltage to be applied to the electric field-correcting electrode is equal to or more than an absolute value of a voltage to be applied to the electric field-correcting electrode when the measurement sample is measured.