Charged Particle Beam Device Groove Contrast

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Solution Overview

Problem

Existing charged particle beam devices face challenges in detecting electrons from deep groove-like patterns due to difficulty in selectively detecting electrons from the bottom without interference from electrons in other directions, leading to inadequate contrast and accuracy in semiconductor inspections.

Innovation Solution

A charged particle beam device incorporating a charged particle passage restricting member with arcuate or longitudinal grooves and a deflector system that controls the electron beam to direct charged particles to specific positions, enhancing the detection of electrons from the groove-like pattern bottoms while minimizing interference from other directions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple detectors are arranged at symmetrical positions to selectively detect electrons discharged in specific directions, then the contrast of deep hole bottom can be emphasized, but the device complexity increases and it is difficult to completely eliminate rotation effect of signal electrons

Engineering Contradiction:

Improvecontrast of deep hole bottomVSAvoiddetector arrangement complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the harmful rotation effect of signal electrons by introducing a specific electromagnetic field configuration that counteracts the rotation, thereby improving measurement precision without requiring complex multi-detector arrangements

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the physical parameters of the electron detection system by adjusting the electromagnetic field strength and configuration to optimize electron trajectory control, achieving better contrast while simplifying the detector arrangement

Inventive Principle:

Principle #35Parameter changes

2Measurement precision

If an acceleration electrode is installed in the magnetic field generation region to reduce rotation effect of signal electrons, then the rotation effect can be reduced to some extent, but it is difficult to completely eliminate the rotation effect and accurately discriminate electron orbit

Engineering Contradiction:

Improveelectron orbit discrimination accuracyVSAvoidelectrode and field configuration complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces an asymmetric electromagnetic field configuration that specifically targets and eliminates the symmetric rotation effect of electrons, achieving complete elimination of rotation while maintaining simple device structure

Inventive Principle:

Principle #4Asymmetry

Solution Approach 2:

The patent inverts the approach by instead of trying to reduce rotation effect gradually through acceleration electrodes, it applies a counter-rotating electromagnetic field that completely eliminates the rotation effect in one step, thereby achieving accurate electron orbit discrimination

Inventive Principle:

Principle #13The other way round (Inversion)

3Productivity

If detectors are arranged to detect electrons from groove-like pattern bottoms, then the detection efficiency is improved, but electrons from other directions cannot be restrained and interfere with the detection

Engineering Contradiction:

Improvedetection efficiency of groove bottom electronsVSAvoidinterference from electrons in other directions

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent converts the harmful interference from electrons in other directions into a beneficial selection mechanism by using the electromagnetic field to naturally guide only the desired electrons to the detector while deflecting unwanted electrons, thereby achieving both high detection efficiency and effective interference rejection

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the contrast and accuracy of detecting electrons from groove-like patterns by effectively guiding electrons to designated positions, enhancing the imaging of both upper and lower layer patterns in multilayer structures.

Implementation Method 1

a deflector that deflects the charged particle discharged toward the groove from the sample

Methodology Applied

Scientific EffectElectromagnetic deflection: Lorentz Force

Data Source

PatentUS10020160B2Charged particle beam device

Publication Date: 2018.07.10 HITACHI HIGH TECH CORP

AI summary

An object of the present invention is to provide a charged particle beam device which can realize improved contrast of an elongated pattern in a specific direction, such as a groove-like pattern. In order to achieve the above-described object, the present invention proposes a charged particle beam device including a detector for detecting a charged particle obtained based on a charged particle beam discharged to a sample. The charged particle beam device includes a charged particle passage restricting member that has at least one of an arcuate groove and a groove having a longitudinal direction in a plurality of directions, and a deflector that deflects the charged particle discharged toward the groove from the sample. The charged particle discharged from the sample is deflected to a designated position of the groove.