Charged Particle Beam Device Mode Switching for Inspection Speed and Flexibility
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Solution Overview
Problem
Conventional charged particle beam devices face challenges in flexibly changing irradiation conditions such as current, energy, and field of view, limiting their effectiveness in certain applications like memory testing, where multi-beam devices are inefficient due to the need for fixed beam settings.
Innovation Solution
A charged particle beam device that includes a primary electron optical system, detectors for secondary particles, and a control unit for switching between multi-beam and single-beam modes, allowing flexible adjustment of beam conditions through a switching mechanism that utilizes both multi-beam and single-beam capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a multi-beam type charged particle beam device is used to increase inspection speed, then productivity is improved, but adaptability deteriorates because it is difficult to freely change irradiation conditions such as current, energy, and field of view
Solution Approach 1:
The patent implements a switching mechanism that dynamically changes the operational mode of the charged particle beam device between multi-beam mode and single-beam mode based on inspection requirements. The switching unit allows the system to adapt its beam configuration in real-time, enabling flexible adjustment of irradiation conditions while maintaining high inspection speeds when needed
Solution Approach 2:
The charged particle beam device is designed to perform multiple functions by incorporating both multi-beam capability for high-speed inspection and single-beam capability for flexible condition adjustment. The switching unit enables the same device to serve both purposes, making it universally applicable to different inspection scenarios without requiring separate dedicated devices
2Adaptability or versatility
If a single beam type device is used to flexibly change irradiation conditions, then adaptability is improved, but productivity deteriorates because inspection speed is slower compared to multi-beam type devices
Solution Approach 1:
The switching mechanism enables dynamic selection between single-beam and multi-beam operational modes. When flexible irradiation conditions are required, the system switches to single-beam mode; when high inspection speed is the priority, it switches to multi-beam mode, thus dynamically optimizing productivity based on current inspection needs
3Adaptability or versatility
If multiple beams are formed and one beam is selected by shielding others, then a single beam type device can be realized, but adaptability deteriorates because it is difficult to flexibly change the condition such as the amount of current irradiated onto the sample and the size of the field of view
Solution Approach 1:
The switching unit dynamically controls the operational state of the beam system, enabling transition between utilizing all multiple beams for high-speed inspection and selecting a single beam for flexible condition adjustment. This dynamic control allows the system to optimize both productivity and adaptability based on inspection requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables high sensitivity and speed in defect detection, allowing for efficient inspection by switching between multi-beam and single-beam modes to adapt to different sample requirements.
Implementation Method 1
irradiating a charged particle beam (hereinafter referred to as a primary beam) such as an electron beam and an ion beam on the sample and obtain a signal of secondary charged particles (hereinafter referred to as a secondary beam) such as generated secondary electrons
Data Source
AI summary
Disclosed is a charged particle beam device, wherein multibeam secondary electron detectors (121a, 121b, 121c) and a single beam detector (140; 640) are provided, and under the control of a system control unit (135), an optical system control circuit (139) controls a lens and a beam selecting diaphragm (141) and switches the electrooptical conditions between those for multibeam mode and those for single beam mode, thereby one charged particle beam device can be operated as a multibeam charged particle device and a single beam charged particle device by switching. Thus, observation conditions are flexibly changed in accordance with an object to be observed, and a sample can be observed with a high accuracy and high efficiency.