Charged-Particle Beam Device Non-Vacuum Imaging
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Solution Overview
Problem
Existing charged-particle beam devices struggle to obtain high-quality images of specimens at atmospheric pressure or in non-vacuum environments due to scattering of the electron beam by gas molecules and barrier films, leading to unclear microscope images and limited device utilization.
Innovation Solution
A charged-particle-beam device with a charged-particle optical lens tube under vacuum, a specimen stage in a non-vacuum space, and a data processing unit that removes the scattering effect from the detector signal, allowing for high-quality image acquisition without the need for specific gases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the barrier film and specimen are kept at a long distance to avoid contact damage, then the barrier film integrity is maintained, but electron beam scattering increases due to gas molecules, resulting in unclear images
Solution Approach 1:
The patent changes the gas pressure parameter in the space between the barrier film and specimen. By reducing the gas pressure (creating a partial vacuum), the mean free path of electrons increases, reducing scattering effects and improving image clarity while maintaining a larger distance between the barrier film and specimen to prevent contact damage.
2Measurement precision
If light-element gas is introduced to reduce electron beam scattering, then image quality improves, but device complexity increases due to gas cylinder disposal and gas discharge requirements
Solution Approach 1:
The patent extracts the gas supply system from the device by utilizing the existing vacuum system in reverse. Instead of introducing light-element gas from external cylinders, the system evacuates gas using the vacuum pump, creating a low-pressure environment that reduces electron scattering without requiring additional gas storage or supply infrastructure.
3Ease of operation
If the specimen is observed in atmospheric pressure without vacuuming, then operational simplicity is maintained, but electron beam scattering due to gas molecules degrades image quality
Solution Approach 1:
The patent segments the device into two pressure zones: the charged-particle optical lens tube maintained at vacuum for optimal electron beam transmission, and the specimen chamber that can be at atmospheric pressure for ease of operation. A barrier film separates these zones, allowing the specimen to be observed in atmospheric pressure while the electron optics remain in vacuum.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-quality image acquisition in non-vacuum environments by effectively reducing the scattering effect of the electron beam, improving image clarity and expanding the device's utility beyond specific cases.
Implementation Method 1
a charged-particle optical lens tube (2) that is subjected to vacuuming inside
Implementation Method 2
providing, between an electron optical system and the specimen, a barrier film or a fine hole that can transmit an electron beam
Implementation Method 3
the charged-particle beam is subjected to scattering due to gas molecules in the atmosphere
Data Source
AI summary
A charged-particle-beam device is provided with a data processing unit that removes, from a detector signal, the effect that scattering of a primary charged-particle beam before the primary charged-particle beam reaches a specimen has on the spot shape of the primary charged-particle beam. For example, when using an electron microscope to observe a specimen in a non-vacuum atmosphere, the effect that scattering of a primary charged-particle beam due to a barrier film or a gas present in a non-vacuum space has on the spot shape of the primary charged-particle beam is removed from a signal acquired by a detector. This makes it easy to obtain high-quality images.