Charged Particle Beam Device Optical Adjustment
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Solution Overview
Problem
High-magnification charged particle beam devices face challenges in accurately positioning emitters for precise performance evaluation of imaging optical systems, leading to difficulties in achieving high-resolution images without inserting emitters into the specimen position.
Innovation Solution
A charged particle beam device with a first column for charged particles, a deflector, a second column for irradiation, a light source, and a control device that uses deflection signals to maintain a certain deflection state, allowing for precise adjustment of the imaging and irradiation optical systems without inserting an emitter into the specimen position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an emitter is inserted into the specimen position for performance evaluation, then the imaging optical system can be evaluated selectively, but accurate positioning becomes increasingly difficult at higher magnifications
Solution Approach 1:
The patent introduces a light source as an intermediary device that generates light beams to interact with the imaging optical system. This light source serves as a mediator between the evaluation system and the imaging optical system, enabling performance evaluation without requiring physical insertion and precise positioning of an emitter at the specimen position. The light beams generated by this intermediary device can be directed through the imaging optical system for evaluation purposes.
Solution Approach 2:
The patent replaces the mechanical insertion and positioning system with an optical system. Instead of mechanically inserting an emitter into the specimen position and manually positioning it, the system uses light sources and optical paths to achieve the same evaluation function. This substitution eliminates the need for complex mechanical positioning mechanisms and reduces positioning difficulty at high magnifications.
2Measurement precision
If an exchange mechanism is installed to replace the specimen with an emitter, then performance evaluation becomes possible, but the device complexity increases
Solution Approach 1:
The patent makes the light source serve multiple functions: it acts as both a specimen illumination source during normal operation and as an evaluation light source when performance assessment is needed. This multi-functionality eliminates the need for separate emitter devices and exchange mechanisms, thereby reducing device complexity while maintaining performance evaluation capability.
Solution Approach 2:
The patent extracts the evaluation function from the mechanical exchange mechanism and implements it through optical means. By separating the evaluation function from the physical specimen replacement process, the system achieves performance evaluation without requiring complex exchange mechanisms, thus reducing overall device complexity.
3Ease of operation
If the imaging optical system is adjusted without precise emitter positioning, then the adjustment process becomes simpler, but beam alignment accuracy may be compromised
Solution Approach 1:
The patent implements feedback mechanisms through detection devices that monitor the light beams generated by the light source. These detection devices provide real-time information about beam positions and optical system performance, enabling automatic or guided adjustment processes. This feedback system ensures that beam alignment accuracy is maintained even when manual positioning is simplified, resolving the contradiction between adjustment simplicity and alignment precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-precision adjustment of imaging and irradiation optical systems, ensuring accurate beam alignment and improved image quality without the need for emitter positioning, thus enhancing inspection speed and resolution in semiconductor devices.
Implementation Method 1
a light source that emits light toward the object, wherein a plurality of deflection signals is obtained based on a detection of charged particles generated corresponding to irradiation of light emitted from the light source
Implementation Method 2
a deflector that deflects charged particles which have passed inside the first charged particle column toward the object
Data Source
AI summary
The objective of the present invention is to propose a charged particle beam device with which an imaging optical system and an irradiation optical system can be adjusted with high precision. In order to achieve this objective, provided is a charged particle beam device comprising: a first charged particle column which serves as an irradiation optical signal; a deflector that deflects charged particles which have passed through the inside of the first charged particle column toward an object; and a second charged particle column which serves as an imaging optical system. The charged particle beam device is provided with: a light source that emits light toward the object; and a control device that obtains, on the basis of detection charged particles generated according to irradiation of light emitted from the light source, a plurality of deflection signals which maintain a certain deflection state, and that selects or calculates, from the plurality of deflection signals or from relationship information produced from the plurality of deflection signals, a deflection signal that satisfies a predetermined condition.