Charged Particle Beam Device Parameter Optimization
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Solution Overview
Problem
Existing charged particle beam devices require a significant amount of time to find optimal parameters for pulsing a charged particle beam, specifically the distance and time between emission points, to achieve appropriate device conditions for observing minute electrical characteristics of a sample.
Innovation Solution
A method and device that determine the optimal distance and time between emission points by acquiring images with varying parameters, evaluating feature amounts, and specifying settings to achieve a predetermined state, allowing for efficient setting of beam emission conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If various combinations of parameters (distance between emission points and time between emission points) are tried to find appropriate device conditions, then the optimal parameters for pulsing the charged particle beam can be determined, but it takes a considerable amount of time to reach the optimum device condition
Solution Approach 1:
The patent implements an automated feedback mechanism where the evaluation unit assesses image quality metrics (such as contrast ratio or signal-to-noise ratio) and the control unit adjusts the distance and time between emission points based on this feedback. This automated loop eliminates manual trial-and-error, significantly reducing the time to determine optimal parameters while maintaining high precision through systematic optimization
Solution Approach 2:
The system performs self-optimization by automatically evaluating image quality and adjusting emission parameters without requiring operator intervention. The evaluation unit continuously monitors image characteristics and the control unit autonomously modifies the pulsed beam parameters to achieve optimal conditions, making the system self-sufficient in determining the best parameters for observing electrical characteristics
2Measurement precision
If the number of parameters to be set (distance between emission points and time between emission points) is increased to pulse the emission beam, then the ability to reveal minute electrical characteristics is improved, but the device complexity increases
Solution Approach 1:
The control unit serves multiple functions: it manages the pulsed beam emission, adjusts the distance and time between emission points, coordinates with the evaluation unit, and optimizes parameters based on image quality assessment. By consolidating these diverse control tasks into a single multi-functional unit, the patent reduces operational complexity despite managing multiple parameters
Solution Approach 2:
The evaluation unit acts as an intermediary between the image acquisition system and the control unit. It translates complex image quality assessments into quantitative metrics that guide parameter optimization, simplifying the control process by providing a clear feedback signal rather than requiring direct interpretation of multiple image parameters
Data Source
AI summary
The purpose of the present disclosure is to propose a charged particle beam device capable of allowing specifying of a distance between irradiation points for a pulsed beam and a time between irradiation points. Proposed is a charged particle beam device equipped with a beam column which has a scanning deflector for sweeping a beam and directs the beam swept by the scanning deflector onto a sample in pulses, wherein: the distance between irradiation points of the pulsed beam is set such that feature quantities of one or more specific regions of an image obtained on the basis of an output of a detector satisfy a predetermined state; the duration of time between irradiation points for the pulsed beam is changed when in a state in which the set distance between irradiation points is set or in a state in which multiple distances between irradiation points determined on the basis of the specified distance between irradiation points are set; and the beam emission is carried out according to the duration of time between irradiation points whereby the feature quantities of the multiple specific regions of the image obtained on the basis of the output of the detector satisfy the predetermined state.