Charged Particle Beam Device Dynamic Protocol Switching
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Solution Overview
Problem
Charged particle beam devices face challenges in achieving high transfer speed while maintaining reliability and tolerance to communication failures, with TCP providing high reliability but low speed and UDP offering high speed but poor failure tolerance, leading to suboptimal usability and increased costs with high-speed hardware.
Innovation Solution
A charged particle beam device that switches between TCP and UDP image transfer units based on the stage's state, using TCP for high reliability when the stage is stopping and UDP for high speed when moving, to optimize transfer characteristics for each condition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If TCP protocol is used for image transfer, then communication reliability is improved, but communication speed deteriorates
Solution Approach 1:
The patent dynamically switches between TCP and UDP protocols based on the stage state. When the stage is moving, UDP is selected for high-speed transfer. When the stage is stopping, TCP is selected for reliable transfer. This dynamic adaptation resolves the contradiction by selecting the appropriate protocol according to operational conditions.
Solution Approach 2:
The patent changes the communication protocol parameter based on the stage state. By monitoring whether the stage is moving or stopping, the system adjusts the protocol selection (TCP or UDP) to optimize the balance between reliability and speed for each operational phase.
2Speed
If UDP protocol is used for image transfer, then communication speed is improved, but communication reliability deteriorates
Solution Approach 1:
The system dynamically selects UDP protocol when the stage is in motion, accepting the reliability trade-off in exchange for high-speed transfer that traces stage movement. When the stage stops, the system switches to TCP to ensure complete and reliable image data transfer.
Solution Approach 2:
The communication protocol parameter is changed based on stage state. UDP is selected during movement phases where speed is critical, and TCP is selected during stationary phases where reliability is paramount, thus resolving the speed-reliability contradiction.
3Speed
If high-speed hardware is used to increase transfer speed, then communication speed is improved, but device cost increases
Solution Approach 1:
Instead of using expensive high-speed hardware continuously, the patent dynamically selects the appropriate communication protocol based on operational needs. UDP provides high-speed transfer capability when needed without requiring specialized hardware, thus achieving speed improvement without increasing device cost.
Solution Approach 2:
The patent changes the software protocol parameter to achieve high transfer speeds when the stage is moving, eliminating the need for expensive hardware upgrades. This software-based solution resolves the contradiction between speed and cost by optimizing protocol selection rather than hardware investment.
Data Source
AI summary
By switching between a plurality of image transfer units based on a state of a stage and using the switched image transfer unit, traceability of stage movement and tolerance to communication failure can be improved. A first image transfer protocol is a protocol of which reliability is higher than reliability of a second image transfer protocol, and a switch unit may select a first image transfer unit in a case where it is determined that a state of a stage is a state in which the stage is stopping. A second image transfer unit is a protocol of which a transfer speed is higher than a transfer speed of the first image transfer protocol, and the switch unit may select the second image transfer unit in a case where it is determined that the state of the stage is a state in which the stage is moving.