Charged Particle Beam Device Diode Resistor Protection Circuit
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Solution Overview
Problem
The charged particle generating device stops heating the electron source when the extraction-electrode power source fails, leading to a high risk of damage to the chip due to continued thermoelectron emission until the chip cools down.
Innovation Solution
A charged particle beam device configuration that includes a diode and resistor connected in series between the acceleration power source and the extraction-electrode power source, allowing continuous extraction of charged particles even when the extraction-electrode power source fails, by using the diode to maintain a voltage and prevent damage to the chip.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the extraction-electrode power source stops applying voltage due to failure, then the device stops heating the electron source to prevent abnormal operation, but thermoelectron emission continues until the chip cools down, causing damage to the chip
Solution Approach 1:
The patent introduces a diode as an intermediary component connected between the extraction electrode and acceleration electrode. This diode acts as a mediator that automatically maintains the extraction electrode voltage even when the extraction-electrode power source fails, preventing both abnormal heating continuation and thermoelectron emission damage to the chip
Solution Approach 2:
The patent pre-configures a protective circuit path through the diode and resistor that activates automatically upon power source failure. This beforehand cushioning ensures that the extraction electrode voltage is maintained in advance, preventing chip damage from thermoelectron emission before it can occur
2Reliability
If the device stops heating the electron source when extraction-electrode power source fails, then abnormal operation is prevented, but charged particle extraction cannot be performed, increasing downtime
Solution Approach 1:
The patent ensures continuous charged particle extraction capability by providing an alternative voltage supply path through the diode when the extraction-electrode power source fails. This allows the useful action of charged particle beam generation to continue without interruption, reducing maintenance downtime
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents damage to the chip by ensuring continuous extraction of charged particles when the extraction-electrode power source fails, reducing downtime and maintenance costs.
Implementation Method 1
a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source
Implementation Method 2
an extraction electrode configured to extract a charged particle from the charged particle source
Implementation Method 3
an acceleration electrode configured to accelerate the charged particle
Implementation Method 4
a state in which thermoelectrons are easily emitted continues after the heating of the electron source is stopped
Data Source
AI summary
The present invention prevents breakage of a chip by using a simple configuration even when an extraction-electrode power source cannot apply voltage to an extraction electrode due to a malfunction, etc. This charged particle beam device is provided with: a charged particle source; an extraction electrode that extracts charged particles from the charged particle source; an extraction-electrode power source that applies voltage to the extraction electrode; an accelerating electrode for accelerating the charged particles; an accelerating power source that applies voltage to the accelerating electrode; and a diode and a resistor which are connected in series between a middle stage of the accelerating power source and the output side of the extraction-electrode power source.