Linearly Movable Beam Displacer for Parallel Inspection
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Solution Overview
Problem
Current optical systems for inspection tools face challenges in making parallel measurements of multiple inspection targets while maintaining the accuracy and optical properties of the beam.
Innovation Solution
The proposed solution involves an inspection apparatus with a radiation source, an optical system, and a detector. The optical system includes a beam displacer with two or more reflective surfaces that displace the optical axis of the beam, allowing it to be shifted linearly while preserving an optical property, enabling parallel measurements of multiple targets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional optical system is used for inspection, then the optical properties of the beam are maintained, but parallel measurements of multiple inspection targets cannot be performed efficiently
Solution Approach 1:
The optical system is segmented into multiple independent measurement channels, each capable of measuring a different inspection target simultaneously. The beam displacer divides the single input beam into multiple displaced beams that can be directed to different targets, enabling parallel measurements without requiring multiple complete optical systems.
Solution Approach 2:
The beam displacer acts as an intermediary optical element that receives a single beam and produces multiple displaced beams. This mediator component enables the system to handle multiple inspection targets simultaneously while maintaining the simplicity of having only one radiation source and one detector, thus improving productivity without proportionally increasing system complexity.
2Adaptability or versatility
If the optical axis is displaced to measure multiple targets, then parallel measurements are enabled, but the optical properties of the beam may be compromised
Solution Approach 1:
The beam displacer is designed to be movable along the optical axis, enabling dynamic adjustment of the displacement amount. This dynamic capability allows the system to adapt to different measurement requirements and target positions while maintaining optimal optical properties. The movable design ensures that the beam can be displaced to various positions without compromising the fundamental optical characteristics.
3Measurement precision
If multiple reflective surfaces are used in the beam displacer, then the optical axis can be effectively displaced, but the device complexity increases
Solution Approach 1:
The beam displacer with multiple reflective surfaces serves multiple functions: it displaces the optical axis, maintains beam direction, and enables parallel measurements. By integrating these functions into a single component with multiple reflective surfaces, the system achieves high measurement precision without proportionally increasing overall device complexity. The same reflective surfaces that create displacement also ensure proper beam orientation and parallelism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for efficient and accurate parallel measurements of multiple inspection targets, improving the throughput of inspection processes without compromising the optical properties of the beam.
Implementation Method 1
The beam displacer comprises two or more reflective surfaces. The beam displacer is configured to receive the beam along the optical axis, perform reflections of the beam so as to displace the optical axis of the beam
Data Source
AI summary
An inspection apparatus includes a radiation source, an optical system, and a detector. The radiation source is configured to generate a beam of radiation. The optical system is configured to receive and direct the beam along an optical axis and toward a target so as to produce scattered radiation from the target. The optical system includes a beam displacer. The beam displacer includes two or more reflective surfaces. The beam displacer is configured to receive the beam along the optical axis, perform reflections of the beam so as to displace the optical axis of the beam, move linearly in at least a first dimension to shift the displaced optical axis, and preserve an optical property of the beam such that the optical property is invariant to the linear movement. The detector is configured to receive the scattered radiation and to generate a measurement signal based on the scattered radiation.