Charged Particle Beam Drawing Device Pattern Data Storage Optimization
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Solution Overview
Problem
Conventional charged particle beam drawing devices face issues with large disk space occupation due to the size of pattern data, which is a result of converting figure data into pattern data, leading to inefficiencies in data storage and processing.
Innovation Solution
A charged particle beam drawing device and method that utilize a pattern generation program to dynamically generate pattern data, specifying the type and regular arrangement of figures, reducing the disk space required for pattern data storage by executing the program to control the drawing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If figure data is converted into pattern data and stored in the storage unit, then the drawing device can perform precise pattern drawing, but the pattern data occupies a large space in the disk
Solution Approach 1:
The patent applies preliminary action by pre-defining figure types and their regular arrangement patterns in the storage unit before actual pattern drawing. Instead of converting and storing complete pattern data for every drawing task, the system stores figure type definitions and arrangement rules in advance, which are then automatically instantiated during operation. This reduces the volume of stored data while maintaining the capability to generate precise patterns when needed.
Solution Approach 2:
The system implements dynamics by enabling flexible combination of stored figure types with various arrangement patterns during runtime. The figure types and arrangement rules stored in the unit can be dynamically instantiated with different parameters (such as positioning coordinates, scaling factors, and arrangement densities) to generate diverse patterns without requiring pre-stored pattern data for each possible variation. This dynamic generation approach significantly reduces storage requirements while maintaining pattern drawing precision.
2Productivity
If a large amount of pattern data is stored for complex figure arrangements, then complete patterns can be drawn without regeneration, but the data processing time and storage requirements increase
Solution Approach 1:
The system performs preliminary action by pre-processing and storing figure type definitions and arrangement rules rather than complete pattern data. This preliminary structuring of data allows for rapid instantiation and generation of patterns during operation, improving drawing efficiency while avoiding the time and storage costs of processing and storing complete pattern datasets for all possible figure arrangements.
Data Source
AI summary
A charged particle beam drawing device includes: a storage unit that stores a pattern generation program for generating pattern data, the pattern generation program being a program in which an instruction for specifying a type of a figure and an instruction for specifying a regular arrangement of the figure are described; an execution unit that executes the pattern generation program stored in the storage unit; and a control unit that performs drawing control based on the pattern data generated by the executed pattern generation program.