Charged Particle Beam Drawing Apparatus Positional Compensation
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Solution Overview
Problem
In drawing apparatuses using multiple charged particle beams, positional inconsistencies arise due to timing differences in control signals supplied to blankers, leading to unwanted irradiation of substrate positions.
Innovation Solution
A drawing apparatus with a blanker array and deflector system that compensates for positional differences by arranging blanker groups at relative positions and supplying control signals at different timings, ensuring precise scanning and irradiation of charged particle beams on a substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If control signals are supplied to blankers at different timings to reduce signal line connections, then the number of signal lines is reduced, but positional inconsistency between drawing regions occurs due to timing differences
Solution Approach 1:
The patent applies preliminary action by pre-calculating and pre-positioning the drawing regions according to the known timing differences between blanker groups. The controller is configured to supply control signals at different timings while the blanker groups are arranged at relative positions that compensate for the positional shifts caused by these timing differences, effectively pre-compensating for the inconsistency before drawing occurs.
Solution Approach 2:
The patent applies local quality by arranging different blanker groups at different relative positions corresponding to their specific timing characteristics. Each blanker group is positioned to compensate for its specific timing delay, creating localized positional adjustments that collectively resolve the overall positional inconsistency across all drawing regions.
2Productivity
If the number of charged particle beams is increased to improve throughput, then productivity increases, but the number of signal lines required increases making connections difficult
Solution Approach 1:
The patent applies merging by combining multiple blanker groups into a single integrated blanker array structure. Multiple blankers that would otherwise require separate signal line connections are grouped together and controlled by shared control signals supplied at different timings, reducing the overall number of signal lines while maintaining control over the increased number of charged particle beams.
Solution Approach 2:
The patent applies preliminary action by pre-establishing the timing sequence for control signals before the drawing operation begins. The controller is configured to supply control signals to different blanker groups at predetermined different timings, allowing the system to handle a large number of beams without requiring proportionally more signal lines.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively compensates for positional inconsistencies, allowing for accurate and precise drawing of patterns on the substrate by synchronizing the operation of blanker groups and deflector, enhancing throughput and reducing the complexity of signal line connections.
Implementation Method 1
a deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate
Implementation Method 2
a blanker array including first and second groups, each of which includes at least one blanker... configured to respectively supply first and second control signals to the first and second groups at first and second timings
Data Source
AI summary
The present invention provides a drawing apparatus for performing drawing on a substrate with a plurality of charged particle beams, comprising a blanker array including first and second groups, each of which includes at least one blanker, a deflector configured to deflect the plurality of charged particle beams to scan the plurality of charged particle beams on the substrate, and a controller configured to respectively supply first and second control signals to the first and second groups at first and second timings, wherein the first and second groups are respectively arranged at such relative positions that a positional difference between respective drawing regions thereof, due to a difference between the first and second timings, in a scanning direction of the deflector is compensated for.