Charged Particle Beam Drawing Progress Ratio Calculation
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Solution Overview
Problem
Charged particle beam drawing apparatuses face challenges in accurately calculating the drawing progress ratio due to incomplete data, leading to significant deviations from the actual progress when estimating the number of shots or stripes, resulting in incorrect representation of the drawing status.
Innovation Solution
A charged particle beam drawing apparatus that calculates the drawing progress ratio using the ratio of the drawn area of the drawing regions to the total area, allowing for continuous updates even when estimated data is unavailable, by employing a control unit to generate shot data and calculate the progress ratio based on the number of drawn columns, stripes, and shots, ensuring accurate representation of the drawing status.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the drawing progress ratio is calculated using the number of drawn columns divided by the total number of columns, then the calculation can be performed with available data, but the drawing progress ratio becomes stagnant and significantly different from the actual progress when column regions have largely different drawing times
Solution Approach 1:
The patent segments the drawing process into multiple unit drawing regions (stripes or shots) within each column region. Instead of treating each column as a single unit, the system divides columns into smaller sub-regions that can be individually tracked. This segmentation allows the drawing progress ratio to reflect actual progress within columns, even when column drawing times vary significantly, thereby improving measurement precision without being affected by the time loss issue.
2Productivity
If the drawing progress ratio is calculated using estimated number of shots or stripes, then the progress can be continuously updated, but the progress ratio becomes incorrect when estimated data is unavailable due to parameter errors or unsupported functions
Solution Approach 1:
The patent introduces an intermediary approach by using the number of drawn stripes within columns as a intermediate metric. When estimated data (number of shots or stripes) is unavailable due to parameter errors or unsupported functions, the system falls back to counting actual drawn stripes in each column. This intermediary metric serves as a reliable alternative that maintains continuous progress monitoring while ensuring accuracy when estimated data cannot be obtained.
3Measurement precision
If the drawing progress ratio is updated frequently, then the representation of drawing status becomes more accurate, but the calculation complexity increases when dealing with multiple column regions having different drawing times
Solution Approach 1:
The patent segments the calculation into two simple steps: first, calculate the drawing progress ratio for each individual column region based on the number of drawn stripes within that column; second, aggregate these column-level ratios to obtain the overall drawing progress ratio. This segmented approach allows frequent updates with high precision while keeping the calculation system relatively simple, as each segment can be processed independently using the same basic formula.
Data Source
AI summary
A charged particle beam drawing apparatus has a drawing unit including a charged particle source, a deflector and a stage on which a target object is placed, to perform drawing with a charged particle beam on a plurality of drawing regions on the target object, and a calculator to calculate a drawing progress ratio on the target object using a ratio of a drawn area of the drawing regions to a total area of the drawing regions.