Beam Dump Apparatus for EUV Light Generation
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Solution Overview
Problem
Current beam dump apparatuses face challenges in adjusting laser beam optical path and power during EUV light generation, leading to inconsistent thermal loads and beam divergence, which affects target irradiation and requires high-capacity, cost-intensive solutions that are difficult to mount on limited chamber space.
Innovation Solution
A beam dump apparatus comprising attenuator and beam dump modules with adjustable beam splitters and mirrors, controlled by a laser control unit, allowing for precise adjustment of laser beam path and power to match EUV light output conditions, using commercially available beam dumpers and optimizing beam splitter angles to distribute energy effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If high-capacity beam dumpers are used to handle laser beam power adjustments, then thermal load variations are managed, but device complexity and cost increase significantly
Solution Approach 1:
The beam dump apparatus is divided into multiple beam splitters (first beam splitter, second beam splitter) that work together to distribute and manage the laser beam power. Each beam splitter handles a portion of the beam, allowing incremental power adjustment without requiring a single high-capacity beam dumper to handle the entire power load at once.
Solution Approach 2:
The beam splitters are made movable along the optical path through stages (first stage, second stage), enabling dynamic adjustment of beam power distribution. This dynamic configuration allows the system to adapt to different thermal load requirements without changing the fundamental hardware capacity, reducing the need for oversized high-capacity beam dumpers.
2Adaptability or versatility
If dedicated high-capacity beam dump apparatus is provided, then laser beam power adjustment capability is improved, but ease of operation deteriorates due to limited chamber space
Solution Approach 1:
The beam splitters serve multiple functions: they divide the laser beam into different power levels, redirect portions of the beam along the optical path, and enable incremental power adjustment. This multi-functionality eliminates the need for separate dedicated high-capacity beam dump apparatus, simplifying the system while maintaining full power adjustment capability within the limited chamber space.
Solution Approach 2:
The beam splitters and stages are integrated into the existing optical path structure, with components nested within the chamber's limited space. The stages that move beam splitters are incorporated into the optical system's framework, allowing compact arrangement that fits within the chamber without requiring additional external space.
3Stability of the object's composition
If beam splitters are positioned to distribute laser beam power, then beam divergence and intensity distribution become consistent, but device complexity increases due to multiple movable components
Solution Approach 1:
The beam splitters are positioned at asymmetric locations along the optical path, with the first beam splitter at a first position and the second beam splitter at a second position. This asymmetric arrangement allows optimized beam distribution at each stage, enabling consistent beam divergence and intensity distribution through strategic positioning rather than symmetric replication of components.
Solution Approach 2:
The beam splitters act as intermediaries that gradually distribute and redirect portions of the laser beam along the optical path. By introducing these intermediary components, the system achieves consistent beam parameters through incremental power distribution rather than requiring complex direct control mechanisms.
4Ease of manufacture
If commercially available beam dumpers are used, then cost is reduced, but reliability deteriorates due to limited power handling capacity
Solution Approach 1:
Instead of using a single beam dumper that must handle the full laser beam power, the system applies partial action by using multiple beam splitters to divide the beam into smaller portions. Each commercially available beam dumper only needs to handle a fraction of the total power, allowing the use of lower-cost, lower-capacity components while collectively managing the full power load reliably.
Solution Approach 2:
The laser beam power management is segmented across multiple beam splitters and beam dumpers. Each segment handles a portion of the total power, allowing the system to use multiple smaller-capacity components instead of a single high-capacity component. This segmentation enables the use of commercially available, lower-cost beam dumpers while maintaining reliable power handling through distributed load management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables stable target irradiation by maintaining consistent beam divergence and intensity distribution, reducing thermal load variations and allowing for increased EUV light output without the need for high-capacity, dedicated beam dumpers, while being compact enough to fit on limited chamber space.
Implementation Method 1
a first beam splitter provided inclined with respect to the optical axis of a laser beam at a first angle
Implementation Method 2
a first beam splitter provided inclined with respect to the optical axis of a laser beam at a first angle
Implementation Method 3
a mirror provided inclined with respect to the optical axis of the laser beam
Data Source
AI summary
A beam dump apparatus may include: an attenuator module; a beam dump module; and a control unit. The attenuator module includes: a first beam splitter provided inclined with respect to the optical axis of a laser beam at a first angle; a second beam splitter provided inclined with respect to the optical axis at a second angle; a first beam dumper provided such that the laser beam from the first beam splitter enters thereinto; a second beam dumper provided such that the laser beam from the second beam splitter enters thereinto; and a first stage that causes the beam splitters to advance into and retreat from the optical path. The beam dump module includes: a mirror; a third beam dumper provided such that the laser beam from the mirror enters thereinto; and a second stage that causes the mirror to advance into and retreat from the optical path.