Charged Particle Beam Filter for Light Shielding
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Solution Overview
Problem
Charged particle beam apparatuses, such as scanning electron microscopes, face challenges in observing samples when light is emitted during heating, as it interferes with backscattered electron images, which are crucial for in-situ observation of organization structure and composition distribution changes.
Innovation Solution
A charged particle beam apparatus equipped with a filter that allows charged particles to pass through while shielding light emitted from the sample, ensuring that only charged particles are detected by the detector, thereby preventing interference with the image generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a detector is used to detect backscattered electrons for image generation, then image quality and measurement precision are improved, but light emitted from the sample during heating is also detected which negatively influences the image
Solution Approach 1:
A filter is introduced as an intermediary component between the sample and the detector. This filter selectively transmits backscattered electrons while blocking light emitted from the sample during heating, thereby preventing light interference with the backscattered electron image detection
Solution Approach 2:
The filter is positioned specifically at the detection surface of the detector where light interference occurs. The filter has localized properties that allow electron transmission while blocking light, addressing the harmful effect precisely where it impacts the detection process
2Object-affected harmful factors
If a filter is added to block light from reaching the detector, then light interference is eliminated, but the device complexity increases
Solution Approach 1:
The filter is implemented as a thin film structure that can be integrated into the existing detector assembly. This thin film approach blocks light while maintaining electron transmission capability, adding minimal structural complexity to the apparatus
Solution Approach 2:
The filter function is merged with the detector assembly, allowing the filter and detector to work as an integrated unit. This combination approach eliminates the need for separate light-blocking components, thereby minimizing the increase in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables effective observation of samples even when light is emitted, maintaining the integrity of backscattered electron images and allowing for continuous monitoring of structural and compositional changes during heating processes.
Implementation Method 1
a filter configured to allow at least a part of the charged particles emitted from the sample to transmit through the filter and configured to shield light emitted from the sample
Data Source
AI summary
The invention provides a charged particle beam apparatus capable of observing a sample even when light is emitted from the sample, and a sample observation method using the charged particle beam apparatus. The charged particle beam apparatus includes: a charged particle beam source configured to irradiate a sample with a charged particle beam; a detector configured to detect charged particles emitted from the sample; and a control device configured to generate an image based on an output signal from the detector. The charged particle beam apparatus further includes a filter configured to allow at least a part of the charged particles emitted from the sample to transmit through the filter and configured to shield light emitted from the sample. The filter covers a detection surface of the detector expected from the sample.