Charged Particle Beam Flow Image for Multi-Point Measurement Setup
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Solution Overview
Problem
Existing charged particle beam apparatuses, such as scanning electron microscopes, lack a visually understandable method to express and execute multi-point measurement sequences, making it difficult for users to set and understand the measurement steps and operations.
Innovation Solution
A charged particle beam apparatus with a flow image display that includes intersecting main and sub flow directions, featuring graphics and symbols representing measurement steps and operations, allowing for a clear visualization of the measurement sequence during setup and execution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a multi-point measurement function is implemented with multiple measurement steps and operations, then the measurement capability is improved, but the complexity of setting and understanding the measurement sequence increases
Solution Approach 1:
The measurement sequence is segmented into multiple measurement steps, where each step can be independently configured and executed. This allows the complex measurement process to be divided into manageable units, improving adaptability while maintaining controllability through modular organization of measurement operations
Solution Approach 2:
A flow image display is introduced as a visual dimension to represent the measurement sequence. The display shows measurement steps arranged along a main flow direction and measurement operations within each step arranged along a sub flow direction, creating a two-dimensional visual representation that simplifies the understanding of complex multi-step measurement processes
2Adaptability or versatility
If multiple measurement steps and operations are included in the measurement sequence, then the measurement comprehensiveness is improved, but the ease of operation deteriorates
Solution Approach 1:
The flow image display acts as an intermediary between the complex measurement sequence configuration and the user. It provides a visual mediation layer that translates abstract measurement steps and operations into an easily understandable graphical representation, improving ease of operation without reducing measurement comprehensiveness
Solution Approach 2:
Different graphical elements in the flow image display can be distinguished by visual characteristics such as color, shape, or positioning. Measurement steps are represented by graphics arranged along the main flow direction, while measurement operations within each step are represented by symbols arranged along the sub flow direction, enabling intuitive visual differentiation and improved user understanding
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates easy understanding and execution of complex measurement sequences by providing a clear visual representation, reducing user confusion and improving workability during setup and operation.
Implementation Method 1
a measurement unit 12 that includes a facility to irradiate a sample with an electron beam, and that measures the sample
Data Source
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AI summary
A composite image (92) includes a flow image (106), and may include an overhead image (102) and a report (108). The overhead image (102) may include a plurality of marks (118) representing a plurality of measurement regions. The flow image (106) includes a plurality of graphics arranged along a main flow direction. Of the plurality of graphics, a multi-graphic includes a plurality of symbols arranged along a sub flow direction. As the report (108), a provisional report or an actual report may be displayed.