Charged Particle Beam Illumination Setting with Depth Visualization

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Solution Overview

Problem

Charged particle beam apparatuses lack a method to assist users in setting illumination conditions, particularly for specimens with multilayer structures, as existing technologies do not provide visual aids or simulations to help determine the depth of physical phenomena like electron penetration and signal generation.

Innovation Solution

A charged particle beam apparatus that includes a calculator to determine the depth of physical phenomena, a generator to create a reference image showing the multilayer structure and depth of these phenomena, and a display to show this image during illumination condition setting, allowing users to visualize and adjust the conditions effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If no visual assistance is provided during illumination condition setting, then the apparatus operation remains simple, but users cannot accurately determine the depth of physical phenomena in multilayer specimens

Engineering Contradiction:

Improveaccuracy of illumination condition settingVSAvoidcomplexity of setting assistance system

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent creates a visual copy (schematic diagram) of the physical phenomenon depths within the specimen. The calculation unit computes depth information, and the diagram generation unit produces a visual representation showing penetration depth of charged particles and generation depth of signals. This schematic copy allows users to accurately understand the three-dimensional distribution of physical phenomena without adding complex hardware, resolving the contradiction between measurement precision and device complexity.

Inventive Principle:

Principle #26Copying

2Adaptability or versatility

If simulation apparatus is used separately to estimate electron scattering range, then estimation capability is provided, but there is no cooperation with the charged particle beam apparatus for integrated setting assistance

Engineering Contradiction:

Improveintegration of simulation capabilityVSAvoidcomplexity of integrated system

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges the simulation capability directly into the charged particle beam apparatus by providing a calculation unit that works integrally with the measurement system. The calculation unit uses measurement conditions (accelerating voltage, particle type) and specimen information (layer structure, material composition) to compute depth distributions, which are then displayed through the existing display unit. This integration allows the apparatus to assist illumination condition setting without requiring a separate simulation system, resolving the contradiction between adaptability and device complexity.

Inventive Principle:

Principle #5Merging (Combining)

3Loss of information

If user designates numerical values for illumination conditions without visual feedback, then setting process is straightforward, but users lack understanding of physical phenomenon depths in multilayer structures

Engineering Contradiction:

Improveinformation about physical phenomenon depthVSAvoidease of illumination condition setting

Core Design Contradiction:

Loss of informationVSEase of operation

Solution Approach 1:

The patent implements feedback by displaying the schematic diagram that visually represents the depth of physical phenomena based on the illumination conditions selected by the user. The diagram shows penetration depth of charged particles and generation depth of signals relative to the multilayer specimen structure. This visual feedback allows users to understand the three-dimensional distribution of physical phenomena and adjust illumination conditions accordingly, resolving the contradiction between information loss and ease of operation.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables users to set appropriate illumination conditions by visualizing the depth of physical phenomena within a specimen, facilitating accurate settings even for those without extensive knowledge of the apparatus, and improving the process over methods without visual assistance.

Implementation Method 1

an electron penetration depth (an electron beam penetration depth, an electron scattering depth) in the specimen changes depending on an element forming the specimen, and the electron penetration depth in the specimen also changes depending on an accelerating voltage (landing voltage) of the electron beam

Methodology Applied

Scientific EffectElectron beam penetration: Electron Beam

Implementation Method 2

an electron penetration depth (an electron beam penetration depth, an electron scattering depth) in the specimen changes depending on an element forming the specimen

Methodology Applied

Scientific EffectElectron scattering: Scattering

Data Source

PatentUS11574795B2Charged particle beam apparatus and setting assisting method

Publication Date: 2023.02.07 JEOL LTD

AI summary

A UI image includes a reference image, which includes a background image and a schematic image. The background image corresponds to a cross section of a specimen having a multilayer structure. The schematic image includes a figure indicating an electron penetration depth, a figure indicating a characteristic X-ray generation depth, and a figure indicating a back-scattered electron generation depth. These figures are displayed in an overlapping manner or in parallel to each other.