Charged Particle Beam Imaging With Adaptive Scan Speeds
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Solution Overview
Problem
Particle analysis using scanning electron microscopes requires long-time measurement to acquire particle images due to the need for repeated image acquisition and analysis of large numbers of particles.
Innovation Solution
A charged particle beam apparatus and method that employs multiple scanning speeds to capture sample and feature images, including a first mode at a higher speed for initial scanning and a second mode at a lower speed for detailed feature object scanning, allowing for efficient image acquisition based on the proportion of the feature object in the field of view.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If the measurement unit scans the sample at a high scanning speed to capture sample images, then the image acquisition time is reduced, but the image quality and measurement precision deteriorate
Solution Approach 1:
The patent applies dynamic scanning speed adjustment by switching between a first scanning speed for capturing sample images and a second scanning speed for capturing feature images. The scanning speed is dynamically changed based on the imaging stage and requirements, allowing fast overview capture followed by detailed feature acquisition only where needed.
Solution Approach 2:
The imaging process is segmented into two distinct stages: sample image acquisition at a first scanning speed, and feature image acquisition at a second scanning speed. This segmentation allows the system to optimize speed for general scanning while dedicating slower, higher-quality scanning only to regions containing feature objects.
2Measurement precision
If the measurement unit scans the entire sample at a low scanning speed to ensure image quality, then the measurement precision is maintained, but the image acquisition time increases
Solution Approach 1:
The patent implements local quality enhancement by applying the second (slower) scanning speed specifically to regions containing feature objects, while using the first (faster) scanning speed for the rest of the sample. This localized approach ensures high image quality where needed without sacrificing overall acquisition time.
Solution Approach 2:
The system performs preliminary scanning at the first scanning speed to identify regions containing feature objects, then performs a second scanning at the second scanning speed only in those identified regions. This preliminary action allows the system to avoid unnecessary slow scanning in areas without features.
3Reliability
If the system repeatedly acquires and analyzes particle images for a large number of particles, then the analysis completeness is improved, but the measurement time increases
Solution Approach 1:
The patent extracts feature images from sample images by identifying regions containing feature objects and capturing them separately at higher quality. This extraction approach allows the system to focus detailed analysis only on relevant regions rather than processing entire sample images, reducing overall measurement time while maintaining analysis completeness.
4Device complexity
If the system uses a single scanning speed for all imaging, then the device complexity is reduced, but the productivity decreases
Solution Approach 1:
The patent implements dynamic scanning speed control that automatically switches between first and second scanning speeds based on imaging requirements. This dynamic control enhances productivity by using fast scanning for overview and slow scanning for details, without requiring complex manual intervention to manage the different scanning modes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required for acquiring feature images, enabling faster particle analysis and extending the measurement time for EDS analysis, thereby improving the accuracy of the analysis process.
Implementation Method 1
a measurement unit that scans a sample with a charged particle beam to capture a sample image
Data Source
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AI summary
A charged particle beam apparatus includes: a measurement unit that scans a sample with a charged particle beam to capture a sample image; an image acquisition unit that acquires a plurality of sample images captured by the measurement unit from a plurality of regions of the sample, and acquires a feature image that is an image of a feature object contained in the sample from each of the plurality of sample images; and an analysis unit that acquires information on the feature object based on the feature image, wherein the image acquisition unit acquires a plurality of feature images by repeating: processing of selecting one mode from among a plurality of modes to acquire the feature image based on a proportion of a region of the feature object occupying a field of view in an acquired sample image; and processing of acquiring the feature image in the selected mode, and wherein the plurality of modes include: a first mode in which the measurement unit scans the sample at a first scanning speed to capture the sample image and the image acquisition unit trims the captured sample image to acquire the feature image; and a second mode in which the measurement unit scans the sample at a second scanning speed that is higher than the first scanning speed to capture the sample image, and scans the region of the feature object in the captured sample image at a third scanning speed that is lower than the second scanning speed to capture the feature image.