Charged Particle Beam Imaging With Pixel-Level Condition Switching
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Solution Overview
Problem
Existing charged particle beam devices require multiple scans and condition changes to acquire detailed images, leading to time-consuming data acquisition and incomplete analysis under different conditions.
Innovation Solution
A charged particle beam device that generates a mixed-condition image by changing detection conditions for each pixel during scanning, allowing for the restoration of single-condition images, thereby reducing the need for multiple scans and enhancing throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the operating condition is changed in several stages during one pixel measurement, then multiple detection conditions can be achieved, but data acquisition time increases significantly
Solution Approach 1:
The patent applies dynamics by making the detection condition changeable during the scanning process. The control unit dynamically switches detection conditions for different pixels within a single scanning cycle, allowing the system to adapt detection parameters (such as energy thresholds or detection modes) to different spatial regions without requiring multiple separate scans. This dynamic adjustment enables multiple detection conditions to be achieved in one scan, resolving the contradiction between versatility and time consumption.
2Ease of operation
If the operating condition is switched after one line measurement, then condition changes are manageable, but detailed analysis under different conditions within one line becomes difficult
Solution Approach 1:
The patent applies segmentation by dividing the scanning field into multiple pixel regions, each assigned different detection conditions. Instead of switching conditions after completing entire line measurements, the system segments the detection process at the pixel level, allowing different detection conditions to be applied to different pixels within the same line. This fine-grained segmentation preserves detailed information about the sample under various detection conditions while maintaining operational manageability through systematic condition assignment.
3Measurement precision
If multiple scans are performed to acquire detailed images under different conditions, then comprehensive analysis is possible, but productivity decreases
Solution Approach 1:
The patent applies merging by combining multiple detection condition acquisitions into a single scanning operation. The control unit orchestrates the simultaneous collection of data under different detection conditions during one scan by dynamically switching conditions between pixels. This merging of multiple detection tasks into one unified scanning process eliminates the need for separate scans, thereby maintaining comprehensive measurement precision while significantly improving productivity through reduced acquisition time.
Data Source
AI summary
A charged particle beam device includes: a charged particle source configured to generate a charged particle beam; a scanning unit configured to scan a sample while deflecting the charged particle beam; a detector configured to detect secondary particles emitted from the sample and output a detection signal; and a control unit configured to generate an observation image of the sample based on the detection signal. The control unit generates a mixed-condition image, in which detection signals under different detection conditions are mixed in a single image, by changing a detection condition of the detector for each pixel in a process of scanning the sample, and uses the mixed-condition image to restore a single-condition image which is an image for each detection condition.