Particle Beam Imaging Simulation for Site Vibration Compensation

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Solution Overview

Problem

Particle beam systems produce inconsistent images due to vibrations at different installation sites, affecting image quality and making it difficult to assess suitability for desired usage.

Innovation Solution

A computational model that simulates particle beam system operation using vibration data and operational parameters to predict image quality, allowing for adjustments to compensate for vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If particle beam systems are operated at different installation sites with same operational parameters, then the system complexity and adaptability to different environments is addressed, but image consistency and quality deteriorate due to vibrations

Engineering Contradiction:
Improveadaptability to different installation sitesVSAvoidimage quality consistency
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by measuring vibrations at the installation site before installing the particle beam system, and using these measurements to adjust operational parameters in advance. The computational model simulates expected image quality based on pre-measured vibration data, allowing operators to optimize settings before actual imaging begins, thereby compensating for site-specific vibrations and ensuring consistent image quality across different locations.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If operational parameters are adjusted to compensate for vibrations, then image quality improves, but the ease of operation and parameter setting becomes more complex

Engineering Contradiction:
Improveimage qualityVSAvoidparameter setting complexity
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The patent applies copying by using a computational model that creates a simulated representation of expected image quality based on measured vibration data. Instead of directly adjusting complex operational parameters, the system generates a virtual model of the imaging conditions, allowing operators to assess and optimize parameters through simulation before applying them in the actual system, thereby simplifying the adjustment process while maintaining high image quality.

Inventive Principle:
Principle #26Copying

3Measurement precision

If computational modeling and simulation are implemented to assess image quality, then the measurement precision and assessment capability improves, but the device complexity and computational requirements increase

Engineering Contradiction:
Improveimage quality assessment precisionVSAvoidcomputational model complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies the intermediary principle by introducing a computational model as a mediator between vibration measurement and image quality assessment. The model acts as an intermediate layer that translates measured vibration data into predicted image quality metrics, allowing operators to evaluate expected performance without directly implementing complex simulations in the particle beam system itself. This intermediary approach enables precise assessment while keeping the actual imaging system relatively simple.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS12562339B2Method for handling a particle beam system, particle beam system, computer and computational system
Publication Date: 2026.02.24 CARL ZEISS MICROSCOPY GMBH
  • US12562339B2 patent drawing
  • US12562339B2 patent drawing
  • US12562339B2 patent drawing

AI summary

A method of operating a particle beam system comprises providing a model which outputs an output image based on a simulation of the particle beam system, generating vibration data from vibrations measured at the installation site, setting values of parameters of an intended operation of the system, providing an input image to the model, inputting the vibration data and the set values of the parameters into the model, and act based on an analysis of the output image. Straight lines in the input image correspond to straight lines in the output image if the vibrations are of a low intensity. Straight lines in the input image correspond to non-straight lines in the output image if the vibrations are of a high intensity. The parameters represent at least one of a working distance, a kinetic energy of particles incident on the sample, and a scan speed.