Charged Particle Beam Inspection Recipes for Region-Specific Defect Detection
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Solution Overview
Problem
Existing inspection methods for device manufacturing processes, such as those used in integrated circuit production, struggle to effectively adapt to the varying characteristics of different regions on a sample, leading to inefficiencies in defect detection and process optimization.
Innovation Solution
A method is disclosed that determines a recipe for charged particle beam inspection based on a second set of characteristics of the sample, including shape, density, composition, and structure, to optimize inspection parameters like landing energy, current, and scan direction, using techniques such as simulation and machine learning to identify regions for inspection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a fixed inspection recipe is used for all regions on a sample, then the inspection process is simple and fast, but the inspection effectiveness varies for different sample characteristics
Solution Approach 1:
The patent implements dynamic recipe selection by determining inspection parameters based on characteristics of each region being inspected. The system automatically adjusts beam energy, current, scan direction, and other parameters according to the specific characteristics (shape, density, composition, structure) of each region, transforming a static inspection process into a dynamic one that adapts to varying sample properties.
Solution Approach 2:
The patent applies local quality by assigning different inspection recipes to different regions on the sample based on their specific characteristics. Each region receives a customized inspection parameter set tailored to its shape, density, composition, or structure, ensuring optimal inspection effectiveness for each local area rather than using a uniform approach across the entire sample.
2Measurement precision
If inspection parameters are optimized for each region, then defect detection effectiveness improves, but the complexity of the inspection process increases
Solution Approach 1:
The patent implements self-service by enabling the inspection system to automatically determine appropriate recipes for each region based on their characteristics. The system autonomously selects inspection parameters without requiring manual intervention or complex external configuration, reducing operational complexity while maintaining high detection accuracy through automated parameter optimization.
Solution Approach 2:
The patent applies preliminary action by pre-establishing multiple inspection recipes with different parameter sets that can be selected based on region characteristics. The system prepares these optimized recipes in advance, allowing quick automatic selection during inspection without real-time complex calculations, thereby reducing process complexity while maintaining measurement precision.
3Reliability
If multiple inspection recipes are used for different regions, then inspection effectiveness for diverse sample characteristics improves, but the time required for recipe determination increases
Solution Approach 1:
The patent applies preliminary action by pre-defining multiple inspection recipes with optimized parameter sets for different region characteristics. These recipes are prepared in advance and stored for quick retrieval, eliminating the need for time-consuming real-time parameter optimization during inspection, thus maintaining high reliability while minimizing time loss.
Solution Approach 2:
The patent implements dynamics by creating a flexible recipe selection mechanism that can quickly adapt to different region characteristics during inspection. The system dynamically selects from pre-prepared recipes based on real-time region analysis, enabling fast parameter adjustment without sacrificing inspection effectiveness for diverse sample types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the effectiveness of charged particle beam inspection by tailoring inspection parameters to the specific characteristics of the sample, improving defect detection and process yield.
Implementation Method 1
charged particle beam inspection of a region on a sample
Data Source
AI summary
Disclosed herein is a method comprising: determining parameters of a recipe of charged particle beam inspection of a region on a sample, based on a second set of characteristics of the sample; inspecting the region using the recipe.