Laser Beam Intensity Shaping for Precise Workpiece Removal

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Solution Overview

Problem

Existing processing apparatuses using laser beams for machine tools face challenges in improving convenience and performance, particularly in efficiently processing workpieces by adjusting the intensity distribution of the beam.

Innovation Solution

A processing apparatus is designed with a first holding system, a beam irradiation system including a condensing optical system, and a controller. This setup allows for relative movement between the workpiece and the beam, enabling adjustment of the intensity distribution of the beam at different planes along the optical axis, thereby optimizing processing efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the beam intensity distribution is adjusted at different planes along the optical axis, then processing efficiency is improved, but device complexity increases

Engineering Contradiction:
Improveprocessing efficiencyVSAvoiddevice complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent implements dynamic adjustability of the beam intensity distribution by allowing the optical system to change the intensity profile at different planes along the optical axis. This enables the processing apparatus to adapt to different workpiece requirements and processing conditions, improving processing efficiency without requiring multiple fixed optical systems.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the intensity distribution parameter of the beam at different planes along the optical axis. By adjusting the intensity profile (e.g., from Gaussian to top-hat distribution) and focal position, the system optimizes processing efficiency for different materials and processing depths while maintaining a single optical system.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the beam intensity distribution is adjusted at different planes, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improveprocessing precisionVSAvoiddevice complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent precisely controls the beam intensity distribution by adjusting parameters such as focal position and intensity profile at different planes along the optical axis. This enables accurate processing at specific depths within the workpiece while maintaining overall system simplicity through a single adjustable optical system.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The optical system is designed to perform multiple functions by adjusting the intensity distribution at different planes, allowing a single system to handle various processing requirements (surface treatment, deep processing, different material types) without requiring separate specialized optical systems for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If relative movement between workpiece and beam is implemented, then processing efficiency is improved, but ease of operation deteriorates

Engineering Contradiction:
Improveprocessing efficiencyVSAvoidease of operation
Core Design Contradiction:
ProductivityVSEase of operation

Solution Approach 1:

The patent implements a control system that coordinates the relative movement between the workpiece and beam, likely using feedback from position sensors and workpiece measurement data. This automation reduces the operational burden on the user while maintaining high processing efficiency through precise, coordinated motion control.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces manual mechanical positioning with automated control systems that manage the relative movement between workpiece and beam. This substitution of automated control for manual operation improves processing efficiency while the control system handles the complexity of coordination, simplifying the operator's task.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus achieves enhanced processing efficiency by allowing for precise adjustment of the beam's intensity distribution, improving the convenience and performance of processing workpieces, particularly in machine tools.

Implementation Method 1

a beam irradiation system including a condensing optical system to emit the beam

Methodology Applied
Scientific EffectOptical energy concentration: Focusing

Data Source

PatentUS12296404B2Processing apparatus and processing method for removal processing with a light beam and having a workpiece position measurement system
Publication Date: 2025.05.13 NIKON CORP
  • US12296404B2 patent drawing
  • US12296404B2 patent drawing
  • US12296404B2 patent drawing

AI summary

A processing apparatus is equipped with: a first stage system that has a table on which a workpiece is placed and moves the workpiece held by the table; a beam irradiation system that includes a condensing optical system to emit beams; and a controller to control the first stage system and the beam irradiation system, and processing is performed to a target portion of the workpiece while the table and the beams from the condensing optical system are relatively moved, and at least one of an intensity distribution of the beams at a first plane on an exit surface side of the condensing optical system and an intensity distribution of the beams at a second plane whose position in a direction of an optical axis of the condensing optical system is different from the first plane can be changed.