Beam Interference Compensation in Charged Particle Microscopy
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Charged particle beam microscopy systems face resolution limitations due to external disturbances such as electromagnetic oscillations and mechanical vibrations, which existing compensation methods often address inefficiently with complex and energy-intensive hardware solutions.
Innovation Solution
A method and system that corrects external interference by dividing the sampling duration into time-windows, constructing intermediate images, detecting shifts, and applying a compensation function to stabilize the image, allowing for real-time or quasi-real-time correction of periodic disturbances in charged particle beam microscopy systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If hardware-based compensation apparatus is used to correct external disturbances, then image quality is improved, but device complexity and energy consumption increase
Solution Approach 1:
The patent replaces hardware-based compensation apparatus with a software-based image processing method. Instead of using physical devices to correct disturbances during acquisition, the invention applies computational algorithms to correct image degradation after acquisition, thereby eliminating the need for complex hardware compensation systems while maintaining image quality improvement
Solution Approach 2:
The patent creates multiple synthetic copies of the image through simulated acquisitions with different disturbance parameters. By generating multiple versions of the image with varying distortion patterns and then fusing them, the method achieves compensation without requiring physical compensation devices, reducing system complexity
2Measurement precision
If hardware-based compensation apparatus is used to correct external disturbances, then image quality is improved, but energy consumption increases
Solution Approach 1:
The patent substitutes energy-consuming hardware compensation devices with computational image processing methods. The software-based approach performs corrections during image processing rather than requiring active hardware intervention during acquisition, significantly reducing energy consumption while maintaining the ability to improve image quality
Solution Approach 2:
The patent performs compensation actions in advance by generating multiple synthetic images with anticipated disturbance patterns before final image reconstruction. This preliminary processing approach allows the system to correct for disturbances without requiring real-time energy-intensive hardware intervention during actual image acquisition
3Measurement precision
If dedicated compensation expertise is required to operate compensation apparatus, then compensation effectiveness is improved, but ease of operation deteriorates
Solution Approach 1:
The patent implements self-service by enabling the microscopy system to automatically perform compensation through integrated software algorithms. The system independently analyzes image degradation patterns and applies corrections without requiring external expert intervention, making the operation simple while maintaining effective compensation
Solution Approach 2:
The patent replaces the need for expert-operated hardware compensation systems with automated software processing. The computational method automatically detects and corrects disturbances through algorithmic analysis, eliminating the requirement for specialized operator expertise while preserving compensation effectiveness
4Measurement precision
If additional time is required to operate compensation apparatus, then compensation accuracy is improved, but productivity deteriorates
Solution Approach 1:
The patent performs compensation calculations in advance by generating multiple synthetic images with predicted disturbance patterns before final reconstruction. This preliminary processing allows accurate compensation to be completed beforehand, reducing the time required during actual imaging operations and improving overall productivity
Solution Approach 2:
The patent maintains continuous useful action by performing compensation operations during the image processing pipeline without interrupting the imaging workflow. The software-based method integrates seamlessly with the acquisition process, allowing compensation to occur continuously without the time losses associated with sequential hardware adjustment and verification
Data Source
AI summary
The present invention relates to a method and a system for compensating interference in a charged particle beam microscopy system. A step of capturing data obtained from irradiation of a sample for a sampling duration can be implemented. In the system a respective data storage is provided for capturing and/or storing this data. Further steps of dividing at least representative parts of the sampling duration into time-windows and constructing, for each of the time-windows, an intermediate image, can be implemented. Detecting shift between the intermediate images and determining a compensation function for the shift between the intermediate images is realized as well. In a system the latter steps are automated by a respective processing component. The shift between intermediate images can be a two-dimensional shift and the compensation function represents a shift of the intermediate images in the two dimensions over time.