Particle Beam Microscope Multi-Detector Image Selection Without Re-Scanning

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Solution Overview

Problem

Conventional particle beam microscopes require laborious and time-consuming re-scanning and re-setting when users realize that initially selected detectors produce unsuitable images, often due to sample damage or detector choice issues.

Innovation Solution

A method that allows simultaneous recording of images using multiple detectors, with selected detectors displaying images in real-time and non-selected detectors storing images for later access, enabling users to retrospectively select optimal images without re-scanning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the user selects only one detector for recording images, then the operation is simple and fast, but the user may miss suitable images that could be obtained from other detectors

Engineering Contradiction:
Improvedetector selection processVSAvoidimage quality options
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The system performs preliminary recording of images from all detectors simultaneously before the user needs to select an image. This advance preparation ensures that suitable images are already available when the user returns, eliminating the need for re-scanning and saving time while maintaining the simplicity of single-detector selection interface.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system creates copies of images from multiple detectors and stores them for later retrieval. Instead of requiring the user to physically re-scan the sample with different detectors, the system provides digital copies of all detector images, allowing the user to review and select the most suitable image without additional scanning time.

Inventive Principle:
Principle #26Copying

2Adaptability or versatility

If the user records images from multiple detectors simultaneously, then the user has more image options available, but the system complexity and data management burden increase

Engineering Contradiction:
Improveimage quality optionsVSAvoiddetector coordination system
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The control system is designed to universally handle multiple detectors through a single unified interface. The same control parameters and scanning routines used for single-detector operation are extended to simultaneously control multiple detectors, making the multi-detector functionality transparent to the user and avoiding the need for complex separate control mechanisms.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system automatically manages the coordination of multiple detectors, image recording, and data storage without requiring user intervention. The control system self-organizes the simultaneous operation of multiple detectors and handles the data management burden, freeing the user from complexity while providing access to multiple image options.

Inventive Principle:
Principle #25Self-service

3Adaptability or versatility

If the user re-scans the sample to obtain images from other detectors, then the user can access images from different detectors, but the sample may be damaged and time is lost

Engineering Contradiction:
Improvedetector selection flexibilityVSAvoidre-scanning time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system performs the action of recording images from all detectors in advance, before the user needs to select an image. By recording all possible detector images during the initial scan, the system eliminates the need for subsequent re-scanning, saving time and preventing additional sample damage while maintaining full detector selection flexibility.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system prepares compensatory measures in advance by recording backup images from all detectors during the initial scan. This creates a buffer of available images that protects against the need for re-scanning, cushioning against time loss and sample damage that would otherwise occur if the initially selected image proves unsuitable.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

4Loss of information

If the system stores images from all detectors, then the user can retrospectively select the best image, but the storage requirements and data management increase

Engineering Contradiction:
Improveimage availabilityVSAvoidstored image data
Core Design Contradiction:
Loss of informationVSQuantity of substance

Solution Approach 1:

The system applies different quality levels or storage priorities to images from different detectors based on their specific characteristics and potential usefulness. Rather than uniformly storing all images with equal priority, the system can optimize storage by identifying which detector images are most likely to be useful and ensuring those are preserved, while managing overall storage requirements through selective quality management.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20250316446A1Method for operating a particle beam microscope, particle beam microscope and computer program product
Publication Date: 2025.10.09 CARL ZEISS MICROSCOPY GMBH
  • US20250316446A1 patent drawing
  • US20250316446A1 patent drawing
  • US20250316446A1 patent drawing

AI summary

A method for operating a particle beam microscope comprises receiving a selection, by a user, of at least one detector from a plurality of detectors, wherein the selection specifies the detectors from which recorded images should be displayed. The method further comprises single or repeated scanning of an object, recording a plurality of images during a scanning procedure of single or repeated scanning using the plurality of detectors, displaying only the images recorded by the selected detectors during the single or repeated scanning procedure, storing the images recorded by the selected detectors and the images recorded by the non-selected detectors, and following the completion of the single or repeated scanning procedure, receiving a selection of at least one of the stored images recorded by one of the non-selected detectors and displaying the selected image.