Particle Beam Microscope Ring Electrode for Backscatter Focusing
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Solution Overview
Problem
Conventional particle beam microscopes face challenges in focusability of the electron beam and versatility in particle beam-microscopic examinations, particularly in detecting backscattered electrons with higher kinetic energy.
Innovation Solution
The proposed particle beam microscope incorporates an electron beam source, a beam tube with an electrically conductive inner surface, a magnetic objective lens, an object holder, and a scintillator, with a potential supply system that includes a first ring electrode and specific electric potential configurations to enhance focusability and detection capabilities, allowing the scintillator to be positioned between the beam tube end and the object plane, and the ring electrode to create a significant electric field for improved electron beam focusing and spatial resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the scintillator is positioned in the proximity of the point of incidence of the electron beam on the object to detect backscattered electrons, then the detection capability for backscattered electrons is improved, but the focusability of the electron beam deteriorates due to electric field inhomogeneities and astigmatism effects
Solution Approach 1:
A first ring electrode is introduced as an intermediary component between the beam tube and the scintillator. This ring electrode creates a controlled electric field that mediates the interaction between the electron beam and the scintillator, enabling the scintillator to be positioned close to the object for backscattered electron detection while maintaining electron beam focusability through proper field management
Solution Approach 2:
The electric potential of the first ring electrode is specifically configured to create a significant electric field in the region between the beam tube and the scintillator. By changing the electric field parameters (potential difference, field strength distribution), the system achieves both improved backscattered electron detection and maintained electron beam focusability despite the close positioning of the scintillator
2Adaptability or versatility
If the scintillator is positioned close to the object plane to detect backscattered electrons with higher kinetic energy, then the field of use for particle beam-microscopic examinations is expanded, but electric field inhomogeneities increase causing astigmatism
Solution Approach 1:
The first ring electrode serves as a field-shaping intermediary that creates a controlled electric field environment. This mediator allows the scintillator to be positioned in the proximity of the object plane for versatile examinations while the ring electrode's electric field compensates for and reduces the inhomogeneities that would otherwise cause astigmatism
Solution Approach 2:
By adjusting the electric potential of the first ring electrode, the electric field parameters are optimized to reduce field inhomogeneities in the region between the beam tube and the scintillator. This parameter control enables the scintillator to be positioned for expanded field of use while maintaining electric field stability and reducing astigmatism effects
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the focusability of the electron beam and expands the field of use for particle beam microscopes by effectively detecting backscattered electrons and maintaining high spatial resolution across various angles of incidence, reducing electric field inhomogeneities and astigmatism effects.
Implementation Method 1
an electron beam source (5), configured to generate an electron beam (17) whose electrons are accelerated to a high kinetic energy before they enter the beam tube (7)
Implementation Method 2
The magnetic objective lens (9) serves to focus the electron beam (17) in an object plane (4). The magnetic objective lens (9) comprises a solenoid (49) and a yoke (45) with two pole ends (46, 47), each extending around an axis of symmetry (41) of the magnetic objective lens (9). A current flowing through the solenoid (49) generates a magnetic field which exits the yoke (45) at the pole ends (46, 47) and has a focusing effect on the electron beam (17).
Implementation Method 3
The scintillator (59) is configured to generate light from electrons arriving from the object plane (4).
Implementation Method 4
The electrons generated at the object are accelerated in a direction away from the object in the electric field which retards the electrons moving toward the object.
Implementation Method 5
the first ring electrode (55a) to create a significant electric field for improved electron beam focusing and spatial resolution
Data Source
AI summary
A particle beam microscope comprises an electron beam source, a beam tube, a magnetic objective lens having two pole ends, an object holder, a scintillator between the lower end of the beam tube and an object, a ring electrode between the scintillator and the object, and a potential supply system. The potential supply system provides: a potential U1 to the object holder; a potential U2 to the ring electrode; a potential U3 to the scintillator; and a potential to an electrically conductive inner lateral surface of the beam tube, such that U4>U1, U3>U1, U2>U1 and U2>U3.