Beam Microscope Valve Shielding for Stable Image Position

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Solution Overview

Problem

Existing valves in charged particle beam microscopes suffer from issues such as electrical contact spring deterioration, charging of sealing rings, and particle generation due to friction, leading to image quality deterioration and unstable image positions.

Innovation Solution

The proposed valve design includes a valve member with a shielding member to prevent charging of the sealing ring, a flexible electrically conducting wire for biasing, and the use of a vacuum-compatible lubricant to reduce friction and particle generation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an electrical contact spring is used to bias the valve member, then the valve member can be electrically biased to control valve operation, but the electrical contact spring deteriorates over time due to corrosion and mechanical wear, leading to undefined potential and particle generation

Engineering Contradiction:

Improvevalve member biasing reliabilityVSAvoidelectrical contact spring lifespan

Core Design Contradiction:

ReliabilityVSDuration of action of moving object

Solution Approach 1:

The patent removes the electrical contact spring from the valve member assembly entirely. Instead, the valve member body itself is made electrically conductive and serves as the biasing element, eliminating the separate contact spring component that was causing deterioration through corrosion and mechanical wear.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The valve member body is given dual functionality: it serves both as the mechanical sealing component (with the sealing ring) and as the electrical biasing element. By making the valve member body electrically conductive, it directly provides the electrical potential needed for valve operation without requiring a separate contact spring.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Ease of operation

If the sealing ring is exposed to the charged particle beam in the open position, then the valve can be opened for beam passage, but the sealing ring becomes charged by the charged particle beam, leading to deflection of the charged particle beam and deteriorated image quality

Engineering Contradiction:

Improvevalve opening for beam passageVSAvoidsealing ring charging effect

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent introduces an electrically conductive shielding member as an intermediary between the charged particle beam and the sealing ring. This shielding member is positioned to block the charged particle beam from directly striking the sealing ring when the valve is in the open position, thereby preventing charging of the sealing ring while still allowing the beam to pass through the valve opening.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Force

If conventional lubricants are used at sliding contact points, then friction between moving parts is reduced, but particles are generated due to friction, affecting vacuum quality and image stability

Engineering Contradiction:

Improvefriction at sliding contactVSAvoidparticle generation from friction

Core Design Contradiction:

ForceVSObject-generated harmful factors

Solution Approach 1:

The patent specifies the use of vacuum-compatible lubricants at all sliding contact points between the valve member and valve seat. These lubricants are specifically selected to be compatible with vacuum environments, meaning they have low vapor pressure and do not outgas significantly, thereby preventing particle generation that would compromise vacuum quality and image stability.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the reliability of the valve member biasing, shields the sealing ring from charging, and reduces friction and particle generation, thereby improving image quality and stability in charged particle beam microscopes.

Implementation Method 1

the valve member further comprises an electrically conducting shielding member extending at least at a sized surface of the valve member body facing the opening in the second position

Methodology Applied

Scientific EffectElectrostatic shielding: Faraday Cage

Implementation Method 2

at sliding contact points between the valve member and the valve seat, a vacuum-compatible lubricant is used

Methodology Applied

Scientific EffectLubrication: Lubrication

Data Source

PatentUS20250029808A1Valves for charged particle beam microscope, valve member and charged particle beam microscope

Publication Date: 2025.01.23 CARL ZEISS MULTISEM GMBH

AI summary

A valve for a charged particle beam microscope comprises: a valve seat comprising an opening; and a valve member comprising a valve member body and a sealing ring on a first surface of the valve member body. The valve member is movable between a first position where the sealing ring seals around the opening and a second position where the valve member is spaced apart from the opening. The valve member further comprises an electrically conducting shielding member extending at least at a side surface of the valve member body facing the opening in the second position.