Charged Particle Beam Microscope Vibration Characterization

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Solution Overview

Problem

Charged particle beam microscope systems experience vibrations during scanning, leading to distorted images and inefficient troubleshooting due to reliance on experience-based fine-tuning, which is costly and difficult to reproduce.

Innovation Solution

A method and computing agent that utilize encoders to characterize vibrational performance by correlating encoder frequencies with image vibration amplitudes, generating a system vibrational performance chart to assess and improve image quality independently of machine and imaging job specifics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If experience-based fine-tuning is used to handle vibration issues, then the system can be adjusted based on factory or field testing results, but the process requires a lot of trial-and-error making it inefficient and costly both time-wise and manpower-wise

Engineering Contradiction:

Improvevibration handling capabilityVSAvoidtime for trial-and-error tuning

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent replaces the mechanical trial-and-error tuning process with an automated computational system. The vibration characterization module uses image processing algorithms to automatically analyze scan line positions and generate vibration performance charts, eliminating the need for manual experience-based fine-tuning and significantly reducing the time and labor required.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs self-diagnosis and self-characterization of vibration performance. By automatically capturing images, processing scan line data, and generating vibration charts without external intervention, the microscope system enables users to independently characterize and address vibration issues without relying on manufacturer expertise or repeated trial-and-error adjustments.

Inventive Principle:

Principle #25Self-service

2Reliability

If experience-based fine-tuning is used to handle vibration issues, then the system can be adjusted based on factory or field testing results, but the test result is hard to be reproduced on another machine or even for another imaging job on the same machine

Engineering Contradiction:

Improvevibration handling capabilityVSAvoidreproducibility across machines and jobs

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The vibration characterization module is designed as a universal tool that can be applied to any charged particle beam microscope system regardless of the specific machine or imaging job. By using standardized image processing algorithms and generating consistent vibration performance charts from actual operating conditions, the system ensures reproducible results across different machines and imaging applications.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system continuously captures images during normal operation and uses the vibration performance chart as feedback to characterize system behavior. This real-time feedback mechanism allows the system to adapt to different machines and imaging jobs while maintaining consistent, reproducible vibration characterization through objective data analysis rather than subjective experience-based adjustments.

Inventive Principle:

Principle #23Feedback

3Ease of operation

If traditional vibration handling methods are used, then the system relies on manual fine-tuning, but this greatly harms the performance and reliability of the charged particle microscope system due to image distortion and halos

Engineering Contradiction:

Improvemanual fine-tuning capabilityVSAvoidimage quality

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The patent replaces manual fine-tuning operations with automated image processing and vibration analysis. By using computational algorithms to analyze scan line positions and generate vibration performance charts, the system objectively identifies vibration issues without the subjectivity and imprecision of manual adjustment, thereby improving image quality while maintaining ease of operation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS7932494B2Method for characterizing vibrational performance of charged particle beam microscope system and application thereof

Publication Date: 2011.04.26 ASML NETHERLANDS BV

AI summary

A method of characterizing the vibrational performance of a charged particle beam microscope system having at least one encoder is disclosed. The encoder is part of a control system for controlling the speed of a stage whereupon a sample is secured for imaging. A plurality of images each corresponding to a specific encoder working frequency are analyzed to generate imaged pattern vibration amplitude information over an imaging time period. The generated imaged pattern vibration amplitude information is then transformed to generate an imaged pattern vibration amplitude information over a range of encoder working frequencies. Information of system vibrational performance is then derived from the encoder working frequency-based vibration amplitude information. As a result, the vibrational performance of the system is characterized to describe the system vibrational behavior in terms of imaged pattern vibration amplitudes at varying working frequencies of the encoder.