Charged Particle Beam Needle Cleaning via Non-Rotational Sputtering

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Solution Overview

Problem

Existing charged particle beam devices require frequent needle cleaning and trimming to maintain connection strength during automatic sampling, increasing processing time due to the shower-curtain effect and deposition film issues.

Innovation Solution

A charged particle beam device that irradiates the deposition film on the needle with a charged particle beam without rotating the needle, allowing for continuous automatic sampling by controlling the beam application based on image data to maintain connection strength and prevent sample detachment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If needle cleaning is performed frequently to maintain connection strength, then reliability of sample connection is improved, but loss of time increases due to frequent interruptions

Engineering Contradiction:

Improveconnection strengthVSAvoidprocessing time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent applies preliminary action by forming a deposition film on the needle before sampling operations begin. This pre-formed film serves as a protective layer that prevents direct contact between the needle and sample material, thereby maintaining connection strength throughout multiple sampling sequences without requiring frequent cleaning interruptions.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent converts the typically harmful effect of deposition film accumulation (which causes connection weakness) into a beneficial protective layer. By intentionally forming a deposition film through charged particle beam irradiation before sampling, the system transforms what would be a nuisance into a protective barrier that actually strengthens and stabilizes the needle-sample connection over multiple operations.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If needle trimming is performed frequently to prevent sample detachment, then reliability of sample connection is improved, but productivity decreases due to increased processing time

Engineering Contradiction:

Improveconnection strengthVSAvoidsampling throughput

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent applies preliminary action by pre-forming a deposition film on the needle before sampling operations. This protective layer is established in advance to prevent sample detachment during rotation and handling, eliminating the need for frequent trimming interruptions and maintaining high sampling throughput throughout extended operational sequences.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent enables continuity of useful action by allowing multiple sampling sequences to proceed without interruption for needle maintenance. The pre-formed deposition film ensures continuous reliable connection strength, enabling the system to maintain uninterrupted sampling operations and maximize productivity over extended periods.

Inventive Principle:

Principle #20Continuity of useful action

3Ease of operation

If deposition film is formed on the needle, then ease of operation is improved by preventing sample detachment, but loss of substance increases due to material accumulation

Engineering Contradiction:

Improveautomatic sampling capabilityVSAvoiddeposition film material

Core Design Contradiction:

Ease of operationVSLoss of substance

Solution Approach 1:

The patent applies self-service by using the charged particle beam system itself to form the protective deposition film on the needle. The same beam that performs sampling operations also creates the protective layer, eliminating the need for separate preparation steps and enabling the system to maintain its own operational capability autonomously throughout extended use.

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables faster and more efficient automatic sampling by reducing the need for frequent needle cleaning and trimming, allowing multiple sequences to be performed without manual intervention and increasing the operational efficiency of the device.

Implementation Method 1

needle cleaning, in which the deposition film deposited on the needle is irradiated with the focused ion beam from a plurality of directions for removal processing

Methodology Applied

Scientific EffectSputtering: Sputtering

Implementation Method 2

a gas supply portion configured to supply a gas, from which a deposition film is to be formed through application of a focused ion beam

Methodology Applied

Scientific EffectDeposition: Deposition (physical)

Data Source

PatentUS10832890B2Charged particle beam device

Publication Date: 2020.11.10 HITACHI HIGH TECH ANALYSIS CORP

AI summary

To automatically repeat an operation of isolating a sample piece, which is formed by processing a sample with an ion beam, and transferring the sample piece to a sample piece holder, a charged particle beam device includes a computer configured to perform control so that, without rotating a needle with which the sample piece is fixed to the sample piece holder, a deposition film deposited on the needle is irradiated with a charged particle beam from a charged particle beam irradiation optical system.