Charged Particle Beam Device Optical Detection
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Solution Overview
Problem
Conventional charged particle beam devices face difficulties in observing both the interior and surface of a sample due to complex electrical wiring and the need to immerse circuits in culture solutions, making it cumbersome to install and remove samples for microscopic observation.
Innovation Solution
A charged particle beam device that operates in both transmitted and secondary charged particle image modes, using a light-emitting member to convert charged particles into detectable light, eliminating the need for electrical wiring and allowing easy sample placement and observation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If electrical wiring is connected for transmitted charged particle observation, then detection capability is improved, but device complexity and ease of operation deteriorate
Solution Approach 1:
The patent replaces the electrical detection system with an optical detection system. A light-emitting member (scintillator) converts transmitted charged particles into light photons, which are then detected by a photodetector. This substitution eliminates the need for complex electrical wiring connections while maintaining detection capability, directly resolving the technical contradiction between detection capability and device complexity.
2Difficulty of detecting and measuring
If electrical wiring is connected for transmitted charged particle observation, then detection capability is improved, but ease of operation worsens
Solution Approach 1:
By replacing electrical wiring with an optical detection system using a light-emitting member and photodetector, the patent eliminates the need to immerse circuits in culture solutions. Samples can be directly placed on the sample table without complex electrical connections, significantly improving ease of operation while maintaining detection capability through optical signal conversion.
3Ease of operation
If optical detection system is used, then ease of operation is improved, but detection precision may worsen
Solution Approach 1:
The patent introduces a light-emitting member (scintillator) as an intermediary between the charged particles and the photodetector. This intermediary converts the charged particle signals into optical photons, enabling easy optical detection while preserving the precision of the original charged particle measurement. The scintillator material is selected to optimize the conversion efficiency and maintain high detection precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables straightforward and efficient observation of both the interior and surface of a sample without the need for complex wiring or immersion in culture solutions, facilitating easier sample handling and imaging.
Implementation Method 1
a light-emitting member that emits light by being irradiated with a transmitted charged particle
Data Source
AI summary
Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).