Beam Position Image Optimization in Micro-lithography
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Solution Overview
Problem
Micro-lithographic printing processes face challenges in achieving precision due to imperfections in mechanical and optical properties of printing heads, which cannot be adequately corrected by existing methods, leading to deviations in pattern formation that can harm the final result.
Innovation Solution
A method involving the creation of a compensation pattern using multiple exposure beams that are sweepable, allowing for the measurement and calculation of deviations in edge positions, with edge compensating data being computed to adapt print data and correct for these imperfections, enabling more comprehensive compensation for various printing head imperfections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If exposure dose adjustment is performed for wrongly positioned beams, then beam position errors are corrected, but other types of printing errors caused by mechanical and optical imperfections cannot be compensated
Solution Approach 1:
The method performs preliminary measurement of actual beam positions and characteristics before printing, stores this calibration data, and uses it to pre-calculate compensation values for print data. This preliminary characterization of the printing head enables comprehensive correction of various imperfections including beam position errors, size variations, and shape distortions, not just simple position adjustments
Solution Approach 2:
The system measures actual beam positions and printing characteristics, compares them with intended values, and uses this feedback information to compute compensation values that are applied to subsequent print data. This closed-loop approach enables accurate compensation for multiple types of mechanical and optical imperfections by continuously referencing measured deviations
2Productivity
If multiple beams are used for simultaneous exposure, then printing speed is increased, but precision is degraded due to mechanical and optical imperfections in the printing head
Solution Approach 1:
Before high-speed multi-beam printing, the system performs preliminary calibration to measure actual beam positions, sizes, and shapes. These measurements are stored and used to pre-compute compensation values that are applied during normal printing operations, enabling both high speed and high precision by eliminating the need for real-time corrections during fast printing
Solution Approach 2:
The system uses feedback from measured beam characteristics to automatically compute and apply compensation values for each beam's specific deviations. This enables the multi-beam system to maintain precision despite mechanical and optical imperfections while operating at high speed, as each beam's unique errors are corrected based on its measured performance
3Productivity
If beams are swept in a direction perpendicular to the main motion direction, then the width of the printed strip is increased and overall printing speed is increased, but precision is degraded due to imperfections in the printing head
Solution Approach 1:
The system performs preliminary calibration that includes measuring beam positions at multiple sweep positions across the perpendicular direction. This comprehensive preliminary characterization captures how beams behave during sweeping motion, enabling pre-computation of compensation values that correct for sweep-related distortions while maintaining high printing speed
Solution Approach 2:
The system uses feedback from measurements taken at multiple sweep positions to compute compensation values that specifically address distortions introduced during perpendicular sweeping. This enables the system to maintain precision even when beams are swept to increase strip width and overall printing speed, as the measured sweep-related errors are compensated in the print data
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively compensates for a wide range of imperfections in printing heads, improving the accuracy and quality of printed patterns by adapting edge representations in print data, thereby enhancing the precision and reliability of micro-lithographic printing processes.
Implementation Method 1
patterning a workpiece covered with a layer sensitive to electromagnetic radiation
Data Source
AI summary
A method for obtaining a compensation pattern for a workpiece patterning device comprises printing (S11) a calibration pattern with a plurality of simultaneously operating exposure beams being sweepable in a second direction according to calibration pattern print data having a multitude of edges. Positions of the edges are measured (S12). Deviations of the measured positions relative calibration pattern are calculated (S13). Each deviation is associated (S14) with a used exposure beam, with a sweep position and a grid fraction position. Edge compensating data is computed (S15) for adapting edge representations of pattern print data prior to printing to compensate for the calculated deviations. The edge compensating data is dependent on the used exposure beam, the sweep position, and the grid fraction position.