Beam Position Sensor Equidistant Circular Array
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Solution Overview
Problem
Existing optical systems face challenges in accurately determining and adjusting the position of a light beam along a beam path to ensure optimal interaction with optical elements, particularly in systems that require precise positioning for performance, such as EUV light sources and optical lithography systems.
Innovation Solution
A beam position sensor system comprising multiple sensors equidistantly positioned around a region through which the light beam passes, with a controller analyzing sensor outputs to determine the beam's position and generate correction signals to adjust the beam path, ensuring accurate alignment and minimizing back reflections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single sensor is used to detect beam position, then the device complexity is low, but the measurement precision is insufficient
Solution Approach 1:
The beam position detection function is segmented into multiple independent sensors positioned at different locations around the optical element. Each sensor detects light intensity from a specific direction, and the controller integrates these segmented measurements to calculate the overall beam position, achieving high precision without requiring a single complex sensor
Solution Approach 2:
The system transitions from one-dimensional beam position measurement to two-dimensional measurement by arranging sensors in a circular pattern around the optical element. This spatial dimensionality change enables simultaneous detection of beam position deviations in multiple directions, significantly improving measurement precision
2Measurement precision
If multiple sensors are positioned equidistantly around the beam path, then the measurement precision improves, but the device complexity increases
Solution Approach 1:
The circular sensor array configuration serves multiple functions simultaneously: it detects beam position in two dimensions, provides uniform 360-degree coverage, and enables calculation of beam alignment relative to the optical element's center. This universal design achieves high measurement precision while avoiding the complexity of asymmetric sensor arrangements
Solution Approach 2:
The system changes the spatial parameter of sensor positioning from arbitrary or linear arrangements to equidistant circular positioning. This parameter change creates geometric symmetry that simplifies the control algorithm while maximizing measurement precision through uniform angular distribution of sensors
3Reliability
If the beam position is not accurately adjusted, then the system operation is simple, but the performance of optical elements deteriorates
Solution Approach 1:
The system implements a closed-loop feedback control mechanism where the controller continuously receives intensity data from all sensors, calculates the beam's actual position relative to the optical element, determines the deviation from the optimal position, and generates correction signals to adjust the beam path, ensuring reliable optical system performance
Solution Approach 2:
The system replaces complex mechanical beam adjustment mechanisms with a computational approach. Instead of using mechanical actuators to physically reposition optical elements, the system uses electronic processing of sensor data and generates control signals that steer the beam through existing optical steering components, reducing mechanical complexity while improving control precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively determines and adjusts the light beam's position relative to the optical elements, enhancing the performance of optical systems by maintaining optimal beam alignment and reducing back reflections, thereby improving the quality and efficiency of EUV light production and optical lithography processes.
Implementation Method 1
sensors configured to sense radiation from an optical element positioned to interact with light that propagates on the beam path
Implementation Method 2
light reflected from the optical element
Data Source
AI summary
A system includes a plurality of sensors at distinct and separate locations, each of the distinct and separate locations being equidistant from a region that is configured to pass light that propagates along a beam path, the sensors being configured to sense radiation from an optical element positioned to interact with light that propagates on the beam path; and a controller including one or more electronic processors and a computer-readable medium, the computer-readable medium including instructions that, when executed, cause the one or more electronic processors to receive an output from each of the sensors, the output of each sensor including an indication of an intensity of the radiation detected by the sensor, and analyze the received output to determine a position of the light that propagates along the beam path.