Particle Beam Profile Orientation for Directional Resolution Gain
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Solution Overview
Problem
Conventional particle beam systems suffer from chromatic aberration, which limits resolution due to the complex and expensive correctors required to correct these aberrations, making them difficult to adjust and operate.
Innovation Solution
A method involving a particle beam system that manipulates the beam profile to achieve a ratio of interaction lengths of at most 1:1.2, allowing for improved resolution in one direction at the cost of reduced resolution in another direction, using a simpler configuration with fewer components and less expensive multipole field generators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional corrector with multiple multipole field generators is used to reduce chromatic aberration, then resolution is improved, but device complexity increases and operation becomes difficult
Solution Approach 1:
The patent extracts only the essential function of chromatic aberration correction by using a single multipole field generator instead of four sequential generators. This selective extraction of the core correction mechanism eliminates unnecessary components while maintaining the essential aberration correction capability.
Solution Approach 2:
The patent combines multiple functions into a single multipole field generator that simultaneously corrects chromatic aberration and manipulates beam profile. This merging of correction and manipulation functions into one component reduces overall device complexity while achieving the desired resolution improvement.
2Manufacturing precision
If a conventional corrector with multiple multipole field generators is used to reduce chromatic aberration, then resolution is improved, but cost increases
Solution Approach 1:
The patent extracts only the essential correction function by using one multipole field generator instead of four, directly reducing the number of expensive components required while maintaining adequate chromatic aberration correction for improved resolution.
Solution Approach 2:
The patent employs a simpler, more cost-effective single multipole field generator configuration that achieves the necessary correction without the expense of multiple high-performance generators, making the system more economically viable.
3Manufacturing precision
If a conventional corrector with multiple multipole field generators is used to reduce chromatic aberration, then resolution is improved, but ease of operation deteriorates
Solution Approach 1:
The patent removes the complex sequence of four multipole field generators and retains only the essential single-generator configuration, dramatically simplifying the adjustment process while preserving the core chromatic aberration correction function needed for resolution improvement.
Solution Approach 2:
Instead of using multiple sequential corrections that require coordinated adjustment of multiple parameters, the patent inverts the approach by using a single multipole field generator with optimized parameters, transforming a complex multi-parameter adjustment problem into a simpler single-parameter optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides higher resolution in one direction compared to conventional systems without correctors, while maintaining similar functionality with fewer components and reduced costs.
Implementation Method 1
A first multipole field generator 18 is configured to generate a first multipole field for manipulating the beam 3
Implementation Method 2
an objective lens focusing the beam into a focal plane
Data Source
AI summary
Particle beam systems, for example electron beam microscopes, exhibit improved resolution in a first direction by manipulating a beam of charged particles so that the beam has a non-circular beam profile in a focal plane of an objective lens. Multiple images of a sample can be recorded at different orientations of the beam profile relative to the sample, and the recorded images can be synthesized using non-uniform spatial-frequency weights to obtain an image of the sample having improved resolution in any direction. The orientation of the beam profile can be adjusted to a target orientation depending on a structure on a sample prior to recording an image of the sample, thereby making it possible to achieve highest resolution in a selected direction of interest.