Beam Reverser Prism with Prime Cut Corners

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Solution Overview

Problem

High-power laser systems face challenges in maintaining optical component performance due to high optical fluence and thermal stress, leading to absorption, distortion, and misdirection of laser beams, especially in gas discharge lasers used for photolithography and other high-energy applications.

Innovation Solution

The implementation of prime cut optical components, such as beam reverser prisms and windows, with optimized chamfered corners and surface finishes, and crystal orientations to minimize stress birefringence and absorption, along with strategic placement and polishing to enhance reflectivity and reduce thermal stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If high-power laser systems operate at high optical fluence and thermal stress, then output power and beam energy are improved, but optical component absorption and distortion increase

Engineering Contradiction:
Improveoutput powerVSAvoidlaser absorption
Core Design Contradiction:
PowerVSLoss of energy

Solution Approach 1:

The patent applies local quality by chamfering only the corners of optical components rather than the entire surface. The chamfered corners have different geometric properties (45-degree angles) compared to the main optical surfaces, creating localized stress relief zones that specifically address absorption and distortion problems at the corners while preserving the optical quality of the main surfaces.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes geometric parameters of optical components by introducing chamfered corners with specific 45-degree angles. This parameter change modifies the stress distribution and light reflection characteristics at the corners, reducing absorption and distortion without affecting the overall optical performance of the component.

Inventive Principle:
Principle #35Parameter changes

2Use of energy by moving object

If optical components are exposed to high thermal stress, then laser beam energy is maintained, but polarization loss and distortion increase

Engineering Contradiction:
Improvelaser beam energyVSAvoidpolarization stability
Core Design Contradiction:
Use of energy by moving objectVSStability of the object's composition

Solution Approach 1:

The chamfered corners create localized zones with different thermal and stress properties. These local modifications reduce stress birefringence at the corners, which are typically the most stressed regions, thereby preserving polarization stability in the main beam path while allowing high energy operation.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The chamfered corners preemptively reduce stress concentration before it can cause significant polarization distortion. By modifying the corner geometry in advance, the patent prevents stress birefringence from developing to problematic levels, maintaining polarization stability during high-power operation.

Inventive Principle:
Principle #9Preliminary anti-action

3Ease of manufacture

If optical components have standard corner geometry, then manufacturing is simplified, but laser absorption and thermal stress increase

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidthermal stress
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The patent applies local quality by chamfering only the corners of optical components rather than the entire surface. The chamfered corners have different geometric properties (45-degree angles) compared to the main optical surfaces, creating localized stress relief zones that specifically address absorption and distortion problems at the corners while preserving the optical quality of the main surfaces.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes geometric parameters of optical components by introducing chamfered corners with specific 45-degree angles. This parameter change modifies the stress distribution and light reflection characteristics at the corners, reducing absorption and distortion without affecting the overall optical performance of the component.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces laser absorption and thermal stress on optical components, improving beam stability and output power by minimizing polarization loss and distortion, thereby enhancing the performance of high-power laser systems.

Implementation Method 1

increasing a reflectivity of the chamfered surface of the chamfered corner of the prism

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

crystal orientations to minimize stress birefringence and absorption

Methodology Applied
Scientific EffectStress birefringence: Birefringence

Data Source

PatentUS8982922B2Very high power laser chamber optical improvements
Publication Date: 2015.03.17 CYMER INC
  • US8982922B2 patent drawing
  • US8982922B2 patent drawing
  • US8982922B2 patent drawing

AI summary

An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.