Charged Particle Beam Sample Transfer Conduction Detection
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Solution Overview
Problem
Current technologies lack an efficient method for automatically determining and managing the connection or separation of sample pieces in charged particle beam apparatuses, particularly when the conductivity of the sample pieces is unknown, leading to unreliable and time-consuming processes.
Innovation Solution
A charged particle beam apparatus equipped with a charged particle beam irradiation optical system, a sample stage, a sample piece transferring device, a holder fixing base, an electrical conduction sensor, and a computer that sets a time management mode to determine connection or separation based on electrical conduction, allowing for reliable and efficient automatic sampling and transfer of sample pieces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electrical conduction detection is used to determine connection or separation, then reliability of determination is improved, but the system cannot handle samples with unknown conductivity
Solution Approach 1:
The system dynamically switches between two determination modes: electrical conduction detection mode for conductive samples and process time-based determination mode for non-conductive or unknown conductivity samples. This dynamic adaptability allows the system to maintain high reliability across different sample types by selecting the appropriate detection method based on sample characteristics.
2Productivity
If process time is used to determine connection or separation, then automation speed is improved, but reliability of determination deteriorates
Solution Approach 1:
The system dynamically adjusts the determination method based on sample conductivity. For conductive samples, it uses real-time electrical conduction detection for high reliability. For non-conductive samples, it switches to process time-based determination to maintain automation speed. This dynamic switching resolves the contradiction between speed and reliability.
3Measurement precision
If manual confirmation of sample conductivity is performed, then determination accuracy is improved, but automation level deteriorates
Solution Approach 1:
The system performs self-service by automatically detecting sample conductivity characteristics and selecting the appropriate determination mode without manual intervention. The control unit automatically switches between conduction detection and time-based determination based on the sample's electrical properties, maintaining both high accuracy and full automation.
Solution Approach 2:
The system changes the detection parameter based on sample characteristics: using electrical conduction parameter for conductive samples and process time parameter for non-conductive samples. This parameter adaptation enables automatic determination with high accuracy across different sample types without manual confirmation.
4Reliability
If electrical conduction sensor is added, then determination reliability is improved, but device complexity increases
Solution Approach 1:
The electrical conduction sensor serves multiple functions: it detects sample conductivity characteristics, determines connection status for conductive samples, and triggers the appropriate determination mode. This multi-functionality reduces the need for separate components and minimizes overall system complexity while maintaining high determination reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable and efficient automatic continuous sampling by accurately determining the connection or separation of sample pieces, regardless of their conductivity, thereby improving the process efficiency and reducing the time required for sampling operations.
Implementation Method 1
an electrical conduction sensor configured to detect electrical conduction between the sample piece transferring device and an object
Data Source
AI summary
A charged particle beam apparatus automatically prepares a sample piece from a sample. The apparatus includes a charged particle beam irradiation optical system that emits a charged particle beam. A sample stage with a sample placed thereon is movable relative to the charged particle beam irradiation optical system. A sample piece transferring device holds and transports a sample piece separated and extracted from the sample, and a holder fixing base holds a sample piece holder to which the sample piece is to be transferred. An electrical conduction sensor detects electrical conduction between the sample piece transferring device and an object, and a computer sets a time management mode when electrical conduction between the sample piece transferring device and the sample piece is not detected when the sample piece transferring device and the sample piece are connected to each other.