Beam Scan Control for Precise Two-Stage Material Removal

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Solution Overview

Problem

Existing beam processing technologies face challenges in efficiently and accurately removing specific parts of a workpiece using a processing beam, particularly in controlling the movement and irradiation position to achieve precise removal processes.

Innovation Solution

A beam processing apparatus with a beam irradiation apparatus and a control apparatus that controls the movement of the processing beam along defined paths to perform removal processing on a workpiece, utilizing a Galvano mirror to change the irradiation position and a control system to manage the beam's movement and irradiation areas.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the beam irradiation position is changed to process different parts of the workpiece, then the processing versatility is improved, but the control complexity increases

Engineering Contradiction:
Improveprocessing versatilityVSAvoidcontrol complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

A beam irradiation position change member (such as a galvanometer mirror or optical deflector) is introduced as an intermediary component between the beam source and the workpiece. This mediator dynamically redirects the beam to different positions without requiring physical movement of the entire processing system, thereby achieving processing versatility while keeping the control mechanism relatively simple and localized.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces mechanical movement of the beam delivery system with optical methods for changing beam irradiation positions. By using optical deflectors or mirrors instead of mechanically moving the entire beam delivery apparatus, the system achieves position changes with simpler control and higher precision, reducing overall control complexity while maintaining versatility.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If the beam moving range is reduced for subsequent processing, then the processing precision is improved, but the processing time increases

Engineering Contradiction:
Improveprocessing precisionVSAvoidprocessing time
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The control apparatus pre-calculates and pre-plans the beam moving range for each processing step based on the workpiece geometry and processing requirements. By determining the optimal irradiation area in advance, the system can minimize unnecessary beam movement while ensuring complete coverage of the target area, thus achieving both high precision and efficient processing without excessive time consumption.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and efficient removal of workpiece parts by controlling the beam's movement and irradiation positions, allowing for accurate processing of complex shapes and patterns on various materials, including metals and composites.

Implementation Method 1

a beam irradiation position change member that is disposed on an optical path of the processing beam and that changes an irradiation position of the processing beam on the workpiece

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a control apparatus that controls the beam irradiation apparatus to perform a removal processing of a first part of the workpiece by irradiating a first surface of the workpiece with the processing beam

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS12594628B2Beam processing apparatus
Publication Date: 2026.04.07 NIKON CORP
  • US12594628B2 patent drawing
  • US12594628B2 patent drawing
  • US12594628B2 patent drawing

AI summary

A beam processing apparatus is a beam processing apparatus that irradiates a workpiece with a processing beam, and performs a removal processing of a first part of the workpiece by irradiating a first surface of the workpiece with the processing beam while moving an irradiation position of the processing beam along a first direction, and performs a removal processing of a second part of the workpiece by irradiating a second surface, which is formed at the workpiece by the removal processing of the first part, with the processing beam while moving the irradiation position of the processing beam along the first direction. A moving range of the processing beam for the removal processing of the second part is smaller than a moving range of the processing beam for the removal processing of the first part.