Charged Particle Beam Scanning with Electrostatic Flyback

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Solution Overview

Problem

Charged particle beam systems experience image distortion and blur due to the nonlinear response and flyback time of magnetic deflectors, necessitating longer wait times between scan lines.

Innovation Solution

Incorporating both a magnetic deflector and an electrostatic deflector, with a controller to alternately use the electrostatic deflector for flyback, allowing the magnetic deflector to draw subsequent scan lines, thereby reducing the flyback time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the magnetic deflector is used to deflect the charged particle beam back for the next scan line, then the beam can be redirected to the starting position, but the nonlinear response and transient ringing of the magnetic deflector cause image distortion and blur, requiring a long wait time (flyback time) to reset

Engineering Contradiction:

Improveimage qualityVSAvoidflyback time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The deflection function is segmented between two types of deflectors: the magnetic deflector is used for scanning in the forward direction where linear response is needed, while the electrostatic deflector is used for the flyback operation where speed is prioritized. This segmentation allows each deflector to operate in its optimal performance regime.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The electrostatic deflector acts as an intermediary device that takes over the flyback function from the magnetic deflector. By introducing this intermediate component, the magnetic deflector is freed from the problematic flyback operation, eliminating the source of distortion and blur while maintaining fast beam repositioning.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If the flyback time is extended to allow the magnetic deflector to reset, then image distortion and blur are reduced, but the scanning speed decreases and productivity is lowered

Engineering Contradiction:

Improveimage qualityVSAvoidscanning speed

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The system replaces the magnetic deflection mechanism with an electrostatic deflection mechanism for the flyback operation. The electrostatic deflector responds much faster than the magnetic deflector, eliminating the need for extended wait times and thereby increasing scanning speed and productivity without compromising image quality.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If the electron beam dwell time per pixel is increased to improve image quality, then better images are obtained, but beam-induced damage to the sample increases

Engineering Contradiction:

Improveimage qualityVSAvoidbeam-induced damage

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

By eliminating the flyback wait time through the use of the electrostatic deflector, the electron beam can continuously scan across the sample without interruption. This continuous scanning allows for reduced dwell time per pixel while maintaining adequate image quality, thereby reducing beam-induced damage to the sample.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables faster scanning of samples with reduced electron beam dwell time per pixel, minimizing beam-induced damage and improving image quality by shortening the flyback time and reducing distortion.

Implementation Method 1

a magnetic deflector for producing a magnetic field to deflect the charged particle beam

Methodology Applied

Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

an electrostatic deflector for producing an electric field to deflect the charged particle beam

Methodology Applied

Scientific EffectElectric field: Electric Field

Data Source

PatentUS12586750B2Charged particle beam system and control method therefor

Publication Date: 2026.03.24 JEOL LTD

AI summary

Provided is a charged particle beam system capable of scanning a sample in a short time. The charged particle beam system is operative to scan the sample with a charged particle beam and to obtain a scanned image, and includes a magnetic deflector for producing a magnetic field to deflect the beam, an electrostatic deflector for producing an electric field to deflect the beam, and a controller for controlling both magnetic deflector and electrostatic deflector. The controller causes the magnetic deflector to deflect the beam in a first direction and to draw a first scan line, causes the magnetic deflector to deflect the beam in a second direction perpendicular to the first direction, causes the electrostatic deflector to deflect the beam in a third direction opposite to the first direction, and causes the magnetic deflector to deflect the beam in the first direction and to draw a second scan line.