Charged Particle Beam Scanning Synchronized to Pump EMI

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Solution Overview

Problem

Scientific instruments, such as charged particle systems, face challenges in maintaining accurate scanning patterns due to electromagnetic interference (EMI) generated by components like molecular pumps, which can disrupt the scanning process and affect sample measurement accuracy.

Innovation Solution

An antenna is placed near EMI-generating components and tuned to the frequency of the interference. This antenna sends signals to a controller, which adjusts the scanning pattern of the charged particle beam to avoid interference peaks, such as aligning scan lines with zero crossings of the EMI.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If shielding is provided to block electromagnetic interference, then measurement accuracy is improved, but device complexity increases

Engineering Contradiction:
Improvescanning accuracyVSAvoidshielding structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system uses a sensor to detect electromagnetic interference in real-time and feeds this information back to the controller, which then adjusts the scanning pattern dynamically. This feedback mechanism allows the system to maintain measurement accuracy without requiring complex physical shielding structures.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system changes the scanning parameters (timing, pattern, duration) based on detected electromagnetic interference conditions. By dynamically adjusting these parameters, the system maintains scanning accuracy without adding complex shielding hardware.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If sensitive components are situated away from electromagnetic interference, then measurement accuracy is improved, but instrument size increases

Engineering Contradiction:
Improvescanning accuracyVSAvoidinstrument size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

Rather than physically separating components, the system uses real-time detection and feedback to dynamically adjust scanning operations. This allows sensitive components to remain in compact positions while maintaining measurement accuracy through software-based interference management.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system moves from a spatial solution (physical separation) to a temporal solution (time-based scanning adjustments). By operating in the time domain rather than space, the system maintains compact size while achieving the same interference mitigation effect.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If scanning is avoided during electromagnetic interference peaks, then measurement accuracy is improved, but productivity decreases

Engineering Contradiction:
Improvescanning accuracyVSAvoidscanning throughput
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The system uses periodic scanning patterns that are synchronized with the detected electromagnetic interference cycles. By timing scans to occur during low-interference periods and skipping high-interference periods, the system maintains accuracy while maximizing throughput through optimized periodic operation.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The scanning pattern is made dynamic and adaptive rather than static. The system continuously monitors interference levels and adjusts scanning timing in real-time, allowing it to maintain high productivity by scanning during favorable conditions while preserving accuracy by avoiding poor conditions.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces the impact of EMI on scanning patterns, enhancing the accuracy and reliability of sample scanning in scientific instruments, even as instruments shrink in size.

Implementation Method 1

an antenna configured to detect a frequency of electromagnetic interference generated by the charged particle instrument

Methodology Applied
Scientific EffectElectromagnetic interference detection: Electromagnetic Induction

Data Source

PatentEP4564397A1Scanning patterns for scientific instruments
Publication Date: 2025.06.04 FEI CO
  • EP4564397A1 patent drawingFigure 1
  • EP4564397A1 patent drawingFigure 2
  • EP4564397A1 patent drawingFigure 3~4

AI summary

Systems and methods for adjusting scanning patterns in scientific instruments based on electromagnetic interference. One example charged particle instrument includes a chamber supporting a sample, a column coupled to the chamber, a pump configured to establish a vacuum within the chamber, a sensing device configured to detect a measure of a frequency of electromagnetic interference generated via the pump, and a controller including an electronic processor and a memory. The column includes a charged particle source configured to generate a charged particle beam traveling through the column and into the chamber. The charged particle beam is generated according to a scanning pattern. The controller configured to receive, from the sensing device, a signal indicative of the frequency of the electromagnetic interference and adjust the scanning pattern based on the frequency of the electromagnetic interference.