Charged Particle Beam Device Scanning Suspension Time Control
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Solution Overview
Problem
Existing charged particle beam devices struggle to control the charge amount on a sample surface to a desired value, especially when calculating frame integration images, as they do not account for varying sample states and charge amounts suitable for observation.
Innovation Solution
A charged particle beam device that includes a scanning suspension time setting unit to suspend scanning after generating frame images, allowing for control of the charge amount by integrating frame images after a predetermined time or when the charge amount is saturated, thereby achieving a desired charge state for improved image quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If frame images are integrated immediately after scanning, then the observation efficiency is improved, but the charge amount on the sample surface cannot be controlled to a desired value
Solution Approach 1:
The patent applies preliminary action by suspending scanning for a predetermined time before integrating frame images. This allows the charge amount on the sample surface to stabilize to a desired value before the integration process begins, ensuring both controlled charging conditions and efficient observation.
2Measurement precision
If scanning is suspended for a predetermined time before integrating frame images, then the charge amount on the sample surface can be controlled, but the observation time is increased
Solution Approach 1:
The patent applies parameter changes by optimizing the predetermined suspension time based on the specific sample being observed. By adjusting this time parameter, the system achieves appropriate charge control for different samples while minimizing unnecessary time loss, balancing precision requirements with observation efficiency.
Data Source
AI summary
In order to control a charge amount on a sample surface to a desired value before calculating a frame integration image, the invention provides a charged particle beam device including: a charged particle beam source configured to irradiate a sample with a charged particle beam; a deflector configured to scan an observation region of the sample with the charged particle beam; a detector configured to detect a charged particle emitted from the sample due to scanning with the charged particle beam; an image generation unit configured to generate a frame image of the observation region based on an observation signal output from the detector; and a scanning suspension time setting unit configured to set a scanning suspension time, which is a time during which scanning of the observation region with the charged particle beam is suspended after a frame image is generated, in which the image generation unit calculates a frame integration image by integrating frame images generated with the scanning suspension time interposed.