Beam Separator Inspection for Display Defect Noise Elimination
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Solution Overview
Problem
Existing inspection apparatuses struggle to effectively detect foreign substances or defects on display devices while efficiently eliminating noise, leading to re-operation and increased costs.
Innovation Solution
An inspection apparatus and method that utilizes a separator to change the path of a beam, combined with an inspection module, to differentiate between first and second parts of the inspection object, allowing for the derivation of a separation critical value to adjust beam parameters and eliminate noise, thereby enhancing detection efficiency and reducing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a beam is irradiated to the inspection object without path separation, then the inspection process is simple, but noise from different parts cannot be eliminated leading to reduced detection reliability
Solution Approach 1:
The patent divides the inspection object into multiple parts (first part and second part) and uses a separator to split the reflected beam into multiple paths. Each path corresponds to a different part of the inspection object, allowing independent inspection of each part and elimination of noise from other parts, thereby improving detection reliability.
Solution Approach 2:
The separator acts as an intermediary component between the inspection object and the inspection module. It receives the reflected beam and redirects different portions to different inspection modules or detection positions, enabling selective detection of specific parts while filtering out noise from other areas.
2Measurement precision
If multiple beams are used to inspect different parts, then detection precision improves, but the inspection process becomes more complex and time-consuming
Solution Approach 1:
The patent employs periodic scanning where the beam is sequentially directed to different parts of the inspection object through the separator. The inspection modules detect signals periodically as the beam scans across different regions, allowing comprehensive inspection with optimized timing that reduces total inspection time while maintaining high detection precision.
3Measurement precision
If noise elimination techniques are applied, then foreign substance detection accuracy improves, but the inspection method becomes more complicated
Solution Approach 1:
The separator extracts and separates the beam paths reflected from different parts of the inspection object. By physically dividing the beam into distinct paths, the system can inspect each part independently without interference from noise generated by other parts, thereby improving foreign substance detection accuracy through simple spatial separation rather than complex signal processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method increases inspection reliability and efficiency by effectively distinguishing between different parts of the inspection object, reducing noise interference and minimizing re-inspection costs.
Implementation Method 1
an inspection module spaced apart from the inspection object and onto which a beam, whose path is changed after being irradiated to the inspection object, is incident
Implementation Method 2
a separation member in the opening and configured to change a path of a beam, which passes through the separator
Data Source
AI summary
Disclosed are inspection apparatuses and methods. The inspection apparatus includes a light source configured to irradiate a beam to an inspection object including a first part and a second part different from the first part; an inspection module spaced apart from the inspection object and onto which a beam, whose path is changed after being irradiated to the inspection object, is incident; and a separator between the inspection object and the inspection module and through which at least a portion of the beam, whose path is changed, passes. The separator includes: a frame in which an opening is defined, and a separation member in the opening and configured to change a path of a beam, which passes through the separator.