Charged Particle Beam Energy Spectrum from In-Situ Spot Broadening
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Solution Overview
Problem
Existing methods for determining the energy spectrum of charged particle beams, such as electron beams, are time-consuming and prone to aberrations due to the need for additional beam-optical components and alignment, making them impractical for routine measurements and tool-to-tool comparisons.
Innovation Solution
A method and device that utilize an energy-dependent deflection of the charged particle beam to introduce spot broadening in the sample plane, allowing the energy spectrum to be determined from beam profiles retrieved from in-situ images without the need for additional beam-optical components or extensive alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a spectrometer is used to measure the energy spectrum of charged particle beams, then measurement accuracy can be achieved, but device complexity and alignment requirements increase significantly
Solution Approach 1:
The patent extracts the energy dispersion function from a complete spectrometer system and implements it using only the existing objective lens of the electron microscope. By tilting the objective lens relative to the beam axis, the lens itself acts as a dispersive element that separates electrons by energy in the image plane, eliminating the need for separate spectrometer components while maintaining measurement capability
Solution Approach 2:
The objective lens is made to serve dual functions: its primary function of focusing the electron beam onto the sample, and a secondary function of dispersing the beam by energy when tilted. This multi-functionality allows the same component to perform both imaging and energy spectrum measurement without requiring additional specialized equipment
2Measurement precision
If a spectrometer with additional beam-optical components is used, then energy spectrum can be measured, but measurement time increases due to alignment requirements
Solution Approach 1:
The system uses its own existing objective lens to perform the dispersion function, eliminating the need for separate alignment procedures with external spectrometer components. The tilt angle of the objective lens can be directly controlled and calibrated, making the measurement process self-contained and significantly reducing setup time
3Measurement precision
If conventional spectrometer alignment procedures are used, then energy resolution can be achieved, but the method becomes impractical for routine measurements
Solution Approach 1:
The patent changes the operational parameter of the objective lens from a fixed perpendicular orientation to a variable tilted orientation. By controlling the tilt angle, the system achieves energy dispersion while maintaining the ability to perform routine measurements without complex alignment procedures, making the method practical for regular use
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables quick and accurate determination of the energy spectrum directly from images, reducing the need for complex setups and improving measurement efficiency and accuracy.
Implementation Method 1
introducing an energy-dependent deflection of the charged particle beam that leads to a spot broadening along a dispersion axis in the sample plane
Implementation Method 2
the charged particle beam is focused with a focusing lens toward a sample plane
Data Source
AI summary
A method of determining an energy spectrum or energy width of a charged particle beam (11) focused by a focusing lens (120) toward a sample plane (pS) in a charged particle beam imaging device is described. The method includes (a) introducing an energy-dependent deflection of the charged particle beam (11) that leads to a spot broadening along a dispersion axis in the sample plane (pS), and taking an image of a sample (10) arranged in the sample plane using the charged particle beam; (b) retrieving a beam profile of the charged particle beam from the image; and (c) determining the energy spectrum or energy width from the beam profile. Further embodiments described herein relate to a charged particle beam imaging device configured to determine the energy spectrum or energy width of a charged particle beam, particularly according to any of the methods described herein.