Charged Particle Beam Stage Tilting for Collision Avoidance
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Solution Overview
Problem
Conventional charged particle beam apparatuses face challenges in observing samples of varying sizes and heights due to limited field of view and risk of sample collision with components, especially when tilting is required.
Innovation Solution
A charged particle beam apparatus featuring a stage that can move and tilt samples within a sample chamber, combined with a control unit that separates the sample from the column to allow tilting towards an image capturing apparatus, enabling broader field of view and collision avoidance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the sample is tilted to coincide the observation angle of SEM with OM, then the observation compatibility is improved, but the risk of sample collision with components increases
Solution Approach 1:
The invention introduces a new degree of freedom by enabling the stage to tilt in addition to the conventional sample rotation. This dimensional change in the sample orientation capability allows the sample surface to be angled relative to the chamber wall, creating sufficient clearance to prevent collisions while maintaining the required observation angles for both SEM and OM.
Solution Approach 2:
The stage is designed with dynamic tilting capability that can be adjusted based on the specific observation requirements and sample characteristics. The tilting angle can be dynamically changed to optimize both the observation compatibility and collision avoidance for different samples and observation modes.
2Adaptability or versatility
If the column and sample chamber are made movable to enable tilting, then the observation flexibility is improved, but the column weight must be reduced which deteriorates the column performance
Solution Approach 1:
The invention separates the tilting function from the column by implementing it in the stage. This segmentation allows the column to remain stationary and heavy for optimal performance, while the stage independently provides the necessary tilting motion to achieve observation flexibility.
Solution Approach 2:
The stage acts as an intermediary between the fixed column and the sample, providing the tilting motion needed for flexible observation without requiring the column itself to be movable. This mediator approach preserves column performance while achieving the desired flexibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for effective observation of samples with different sizes and heights by increasing the field of view and reducing the likelihood of collisions, improving observation efficiency and precision.
Implementation Method 1
tilt the sample through the stage so as to face toward the first image capturing apparatus
Implementation Method 2
a column configured to observe the sample by irradiating a charged particle beam on the sample
Data Source
AI summary
In a charged particle beam apparatus is provided with an optical image capturing apparatus having an angle different from that of a column, a sample may collide with other components when the sample is faced toward the optical image capturing apparatus. The charged particle beam apparatus includes a stage configured to place a sample thereon and to move the sample inside a sample chamber; a column configured to observe the sample by irradiating a charged particle beam on the sample; a first image capturing apparatus configured to observe a surface of the sample irradiated with the charged particle beam from an angle different from that of the column; and a control unit configured to, when observing the sample via the first image capturing apparatus, separate the sample from the column and to tilt the sample through the stage to face toward the first image capturing apparatus.