Charged Particle Beam Substrate Handling Robot Wing Geometry
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In charged particle beam systems, such as electron-beam lithography, the substrate handling robots often require a park position to avoid interfering with the substrate positioning system, which consumes time and space, as they need to move out of the main chamber to allow the substrate-supporting structure to move freely.
Innovation Solution
The substrate handling device is redesigned with a modified wing that extends further into the field of travel without crossing the line defined by the substrate-supporting structure, allowing the substrate-supporting structure to move freely in both directions without the robot needing to park, by shaping the wing to lie under the substrate and incorporating grooves for maximum stability and non-interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate handling robot is positioned to allow substrate loading/unloading, then substrate handling capability is improved, but the robot interferes with the substrate positioning system movement
Solution Approach 1:
The robot arm is designed with a specific geometric configuration where the side member extends parallel to the second direction (y-axis) and the wing extends parallel to the first direction (x-axis). This local geometric quality ensures that the robot occupies a specific spatial zone that does not overlap with the substrate positioning structure's travel path, allowing both systems to operate simultaneously without interference.
Solution Approach 2:
The robot positioning system utilizes a two-dimensional coordinate system defined by the bar (first direction) and side member (second direction). By positioning the substrate support at the intersection of these perpendicular directions and defining the wing's extent along the first direction, the system creates a spatial arrangement where the robot's operational envelope is separated from the substrate positioning structure's movement zone in the second direction.
2Length of moving object
If the robot parks outside the main chamber to avoid interference, then substrate positioning movement is improved, but system complexity and space consumption increase
Solution Approach 1:
The invention merges the robot's substrate handling function with its positioning function by designing the robot arm geometry such that it can simultaneously maintain substrate support capability while defining a clear separation zone for the substrate positioning structure. The wing's extension along the first direction and the side member's extension along the second direction create a combined structure that fulfills both requirements without needing to park outside the chamber.
3Stability of the object's composition
If the wing extends further into the field of travel, then substrate handling stability is improved, but interference with substrate positioning structure may occur
Solution Approach 1:
The robot arm exhibits asymmetric geometry where the wing extends along the first direction (x-axis) parallel to the bar, while the side member extends along the second direction (y-axis) perpendicular to the bar. This asymmetric configuration allows the wing to extend maximally into the field of travel for stable substrate support while the perpendicular side member ensures the overall structure does not encroach on the substrate positioning structure's travel path in the second direction.
Data Source
AI summary
In the embodiment a charged particle beam system includes a main chamber, an exchange chamber, an x-y positioning stage housed in the main chamber, a substrate-supporting structure supported by or provided by said stage and moveable in first and second perpendicular directions of travel between limits which define a field of travel and a substrate handling device housed inside the main chamber for loading and unloading a substrate into and out of the main chamber, the device comprising a bar and a side member for supporting the substance to one side of the bar. A method of loading a substrate in a charged particle beam system is also disclosed.