Charged Particle Beam Superimposed Image Display
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Solution Overview
Problem
In charged particle beam apparatuses like scanning electron microscopes, observers face challenges in maintaining a stable field of view during in-situ observations, especially at high magnifications, requiring real-time adjustments without moving their line of sight, which is difficult due to the need to compare live and reference images of varying sizes.
Innovation Solution
A charged particle beam apparatus with an image display device featuring multiple display areas, where a live image and a comparison image are displayed side by side, allowing the comparison image to be made translucent and superimposed over the live image, enabling easy adjustment of the field of view without requiring the observer to move their line of sight.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a live image and a comparison image are displayed side by side in separate display areas, then the observer can compare both images, but the observer must move their line of sight between the two images, making field of view adjustment difficult at high magnifications
Solution Approach 1:
The patent merges the live image and comparison image into a single superimposed display where the comparison image is overlaid on the live image. This allows the observer to see both images simultaneously in the same field of view, eliminating the need to move the line of sight between separate displays and enabling precise field of view adjustment at high magnifications.
Solution Approach 2:
The patent transitions from a two-dimensional side-by-side display arrangement to a layered three-dimensional superimposed display arrangement. By stacking the comparison image over the live image in the depth dimension, the system allows simultaneous viewing of both images at the same screen position, resolving the line of sight movement problem.
2Ease of operation
If the comparison image is made translucent and superimposed on the live image, then the observer can maintain focus on the live image while comparing with the reference, but the image processing complexity increases
Solution Approach 1:
The patent applies parameter changes by adjusting the transparency parameter of the comparison image. By controlling the transparency level, the system allows the comparison image to be overlaid on the live image with appropriate opacity, enabling easy visual comparison while maintaining focus on the live image. This simple parameter adjustment resolves the contradiction without requiring complex image processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise and efficient adjustment of the field of view in real-time, reducing the operational stress on the observer and maintaining focus on in-situ observations without losing the target field of view, even during changes caused by temperature or mechanical forces.
Implementation Method 1
a charged particle beam source, a focusing lens configured to focus a primary charged particle beam emitted from the charged particle beam source, an objective lens configured to focus the primary charged particle beam onto a sample
Implementation Method 2
a detector configured to detect secondary charged particles generated by the irradiation of the primary charged particle beam on the sample
Implementation Method 3
a deflector coil configured to scan the sample with the primary charged particle beam
Data Source
AI summary
In the case of an in situ observation with a charged particle beam apparatus, an observer who is not an expert in the charged particle beam apparatus needs to maintain the field of view of the observation that changes from moment to moment while watching a monitor, and thus, adjustment of the field of view needs to be controllable in real time with a good operability. In order to eliminate the need for an observer to move the line of sight, a live image and a comparison image are overlapped and displayed. At this time, an interface is devised, such that overlapping of two images can be executed without giving stress to the observer. The observer presses a button on an operation screen, thereby displaying a superimposed image, which is obtained by making the comparison image matching the size of a first display area configured to display the live image translucent and superimposing the translucent comparison image on the live image, at the position of the first display area of the image display device.