Beam Synchronization in Ultrafast Microscopy for Drift-Corrected Imaging

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Solution Overview

Problem

Charged particle microscopy faces challenges in aligning and synchronizing pulsed light and electron beams due to target drift, expansion, and heating, leading to prolonged experimental times, increased target damage, and reduced resolution.

Innovation Solution

A method and system for synchronizing pulsed light and electron beams using an RF cavity and beam blanker to generate aligned and corrected images by overlapping non-overlapping time intervals, utilizing a detector to capture images between light beam cycles and correcting for target drift during post-processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If continuous electron beam imaging is used to maintain high resolution, then image quality is improved, but target damage increases due to prolonged exposure

Engineering Contradiction:
Improveimage resolutionVSAvoidtarget damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent implements periodic pulsed electron beam imaging synchronized with periodic laser excitation. The electron beam is delivered in short pulses rather than continuously, allowing the target to cool and recover between pulses. This periodic action maintains high-resolution imaging capability while reducing cumulative target damage by limiting total electron exposure time.

Inventive Principle:
Principle #19Periodic action

2Object-affected harmful factors

If synchronized pulsed beam imaging is implemented to reduce target damage, then target damage is reduced, but beam alignment precision deteriorates due to target drift and expansion

Engineering Contradiction:
Improvetarget damageVSAvoidbeam alignment precision
Core Design Contradiction:
Object-affected harmful factorsVSMeasurement precision

Solution Approach 1:

The patent performs preliminary alignment of the electron beam and laser using alignment markers and diffraction patterns before initiating the synchronized pulsed imaging sequence. Drift correction is continuously applied based on real-time monitoring of alignment markers. This preliminary and continuous correction compensates for target drift and expansion that occur during pulsed imaging, maintaining beam alignment precision despite the reduced imaging duty cycle.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If fast beam blanking is used to achieve picosecond synchronization, then synchronization precision is improved, but device complexity increases due to additional synchronization components

Engineering Contradiction:
Improvesynchronization precisionVSAvoidsynchronization system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the beam blanking function with the laser synchronization control into a unified timing system. The same control electronics that trigger the laser pulses also control the electron beam blanking, eliminating the need for separate synchronization components. This merging achieves picosecond-level synchronization precision while minimizing device complexity by reducing the number of independent control systems.

Inventive Principle:
Principle #5Merging (Combining)

4Measurement precision

If multiple time intervals are used for corrected imaging, then image quality is improved through drift correction, but experimental time increases due to additional imaging cycles

Engineering Contradiction:
Improveimage qualityVSAvoidexperimental time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent implements continuous monitoring of alignment markers and drift parameters during the pulsed imaging sequence, allowing real-time drift correction without interrupting the imaging process. Multiple images are acquired in rapid succession with continuous correction applied, rather than requiring separate imaging cycles for correction. This maintains image quality through drift correction while minimizing experimental time by eliminating idle periods between correction and imaging cycles.

Inventive Principle:
Principle #20Continuity of useful action

Data Source

PatentUS20250349491A1Beam alignment and synchronization in microscopy
Publication Date: 2025.11.13 FEI CO
  • US20250349491A1 patent drawing
  • US20250349491A1 patent drawing
  • US20250349491A1 patent drawing

AI summary

A method for flexible beam blanking in ultrafast transmission charged particle microscopy may include directing, during a first time interval, a first charged particle beam and a first pulsed photon beam towards a target, generating a first image of the target based at least in part on first interactions of the first charged particle beam with the target, directing, during a second time interval, a second charged particle beam toward the target, and generating a second image of the target based at least in part on second interactions of the second charged particle beam, and generating a corrected image of the target based at least in part on the first and second image.